Ebara Corporation

Ebara Research Co., Ltd.

Tokyo Electron Limited

Hidenobu Arimitsu

Hiroshi Yokota

Takayuki Saito

Akira Fukunaga

Kunio Fujiwara

Shuji Moriya

Takenobu Matsuo

Hiroyuki Shima

Tsuyoshi Wakabayashi

Kazuyoshi Takeda

Ken Nakajima

Yoshiharu Yasuhara

Yoko Iwase

Toshihiko Shiota

An object of the present invention is to provide a water adsorbing/desorbing organic polymer material having excellent water adsorbing/desorbing performance and which is inexpensive and readily disposable by incineration or the like. In order to attain this object, water adsorbing/desorbing organic polymer materials of the present invention are characterized by having a polymer side chain containing a hydrophilic group on the backbone of an organic polymer base.

Moisture adsorbing and desorbing material

A gas measuring device includes a dissolving unit for dissolving gas to be measured in solvent medium, a measuring unit for measuring the amount of ions generated when the gas to be measured is ionized in the liquid medium, and a calculating unit for calculating the amount of the gas to be measured from a value measured by the measuring unit.

Gas measuring device and processing apparatus provided with the gas

Ultrapure water is formed by a process employing a simple system for safely and easily removing oxygen from water containing dissolved oxygen; which process comprises dissolving a reducing agent in water containing dissolved oxygen and irradiating the resulting water with ultraviolet rays. The ultrapure water is particularly utilized as a rinsing water in the electronics industry.

Process for removing dissolved oxygen from water and system therefor

An absorber that is capable of efficient absorption of SiF.sub.4 and/or BCl.sub.3 present in gases that are discharged from semiconductor fabrication plants, ceramic producing plants and other plants is disclosed. The absorber contains an alkali agent, water and a superabsorbent as effective components. This absorber, when used to treat an effluent gas, attains as high reaction rate as in the conventional wet process and can be handled as easily as in the dry process.

Gas absorber

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Kanagawa, Japan

Hidenobu Arimitsu