Mitutoyo Corporation

Mitutovo Corporation

Hidemitsu Asano

Masato Kon

Sadayuki Matsumiya

Gyokubu Cho

Koichi Komatsu

Kozo Ariga

Jyota Miyakura

Makoto Kaieda

Hiroyuki Yoshida

Koji Kubo

Tatsuya Nagahama

Akira Takada

Hiroshi Sakai

Tomonori Goto

Masanori Arai

Hisayoshi Sakai

Shuichi Kamiyama

Hiromu Maie

Ken Motohashi

Seiji Sasaki

Takeshi Saeki

Takashi Hanamura

Takuho Maeda

Nobuyuki Nakazawa

Yoshihiko Takahashi

Isao Tokuhara

Yusuke Goto

Makoto Uwada

Yasuo Sugita

Volume data is generated by performing a CT scan with a spherical calibration jig having known dimensions in contact with an object. A profile of the surface shape of the object in the volume data is obtained, and a boundary surface of the spherical calibration jig is calculated from the center coordinates of the spherical calibration jig. A correction value for adjusting a boundary surface of the object determined from the gradient of the profile to the boundary surface of the spherical calibration jig is determined, and the boundary surface of the object is corrected by using the correction value. The shape of the object is determined by using the corrected boundary surface. The precision of measurement X-ray CT can thus be increased by accurately detecting the boundary surface of the object.

Calibration method and apparatus for measurement X-ray CT apparatus, measurement method and apparatus using the same, and measurement X-ray CT apparatus

A measurement X-ray CT apparatus calibrates a geometrical positional relationship between a focus of an X-ray source, an X-ray detector, and a rotation center of a rotating table in advance. The measurement X-ray CT apparatus then obtains projection images by irradiating the object to be measured with X-rays to perform a CT scan, and generates a three-dimensional image of the object to be measured by CT reconstruction of the projection images. The measurement X-ray CT apparatus further includes a reference frame that is made of a material and has a structure less susceptible to environmental changes, and sensors that are located on the reference frame and intended to successively obtain calibration values of the geometrical positional relationship between the focus of the X-ray source and the X-ray detector during the CT scan. The calibration values are used as parameters of the CT reconstruction.

Measurement X-ray CT apparatus

When measuring a mass-produced work piece using a measuring X-ray CT apparatus, which is configured to emit X-rays while rotating a work piece that is arranged on a rotary table and to reconstruct a projection image thereof to generate volume data of the work piece, the present invention assigns values to volume data for a predetermined work piece and stores the same as master data; obtains volume data for a mass-produced work piece under identical conditions to the predetermined work piece; measures the volume data and obtains an X-ray CT measured value for the mass-produced work piece; and corrects the X-ray CT measured value for the mass-produced work piece using the master data.

Measuring X-ray CT apparatus and production work piece measurement method

When generating a tomographic image using a measuring X-ray CT apparatus that is configured to emit X-rays while rotating a specimen that is arranged on a rotary table and reconstruct a projection image thereof to generate a tomographic image of the specimen, an amount of geometric error that is included in the projection image is obtained in advance and stored; the projection image is corrected using the stored amount of geometric error; and a tomographic image is reconstructed using the corrected projection image.

Measuring X-ray CT apparatus and tomographic image generating method

A dimensional X-ray computed tomography system configured to obtain projection images by irradiating an object to be measured disposed between an X-ray source and an X-ray detector with X-rays for CT scan, and generate a three-dimensional image of the object to be measured by performing CT reconstruction on the projection images, includes a fixed table on which the object to be measured is placed, and a movable X-ray source and a movable X-ray detector that are capable of moving around the fixed table with the fixed table therebetween.

Dimensional X-ray computed tomography system and CT reconstruction method using same

When generating a measurement plan for measuring X-ray CT that performs X-ray irradiation while rotating a test object, and in doing so acquires projection image data, reconstructs volume data from the projection image data, and measures a targeted measurement location in the volume data, the present invention calculates required measurement accuracy and a measurement field of view range based on tolerance information included in CAD data of the test object and a measurement location on the test object defined by a measurement operator ahead of time, and automatically generates, from this information, an optimized measurement plan that minimizes the number of measurements.

Method and apparatus for generating measurement plan for measuring X-ray CT

An X-ray CT measuring apparatus configured to emit an X-ray from an X-ray source while rotating a subject arranged on a rotary table, and obtain a tomographic image of the subject by reconstructing projection images, includes an imaging unit for imaging the subject on the rotary table from above or sideways, an obtaining unit for obtaining an image of the subject while rotating the subject, a calculating unit for calculating a maximum outer diameter of the subject during rotation by using the obtained image of the subject, and a setting unit for setting a movement limit of the rotary table on the basis of the maximum outer diameter.

X-ray CT measuring apparatus and interference prevention method thereof

A cross-section measurement method measures a cross section of a three-dimensional object formed by an object-forming machine that laminates an object material at an object-forming point. The object-forming machine includes: a table; an object-forming head; a beam supporting the object-forming head; a driver that moves the object-forming head relative to the table along the beam; an object-former on the object-forming head that laminates the object material on the table to form the object; and an imager on the object-forming head and that captures an image of the object. The object-former and the imager are indirectly supported by the beam via the object-forming head. The method includes: controlling the driver and the object-former to form the object on the table; capturing an image of the object with the imager while the object is being formed; and measuring a cross section of the object based on the captured image.

Object-forming machine, cross-section measurement apparatus, and cross-section measurement method

A 3D printer includes: an object-forming unit for forming an object by laminating an object material at an object-forming point based on a design data; an image capturing unit for capturing an image of the object formed by the object-forming unit; and a shape measurement unit for measuring a cross section of the object based on the image captured by the image capturing unit while the object is under formation by the object-forming unit.

A surface texture measuring apparatus includes an X axis displacement mechanism and a Y axis displacement mechanism displacing a measurable object having an interior wall along an XY plane; a measurement sensor measuring a surface texture of the interior wall without contact; a Z axis displacement mechanism displacing the measurement sensor in a Z axis direction orthogonal to the XY plane and bringing the measurement sensor to face the interior wall; a W axis displacement mechanism displacing the measurement sensor facing the interior wall in a normal direction of the interior wall; and a &#x3b8; axis displacement mechanism displacing the measurement sensor facing the interior wall along the interior wall.

Surface texture measuring apparatus

An XY shift mechanism can shift a rotary table in a two-dimensional direction (XY direction) orthogonal to a rotation axis of the rotary table. By collaborative control of the shift position of the rotary table in the two-dimensional direction in synchronization with the rotation of the rotary table, rotation is made possible about a virtual rotation center that is set at an arbitrary position on the rotary table. The collaborative control of the shift position of the rotary table in the two-dimensional direction also corrects rotation eccentricity owing to the eccentricity of the rotary table. Thus, the virtual rotation center can be set at an arbitrary position on the rotary table, thus enabling obtainment of high resolution tomographic images of a plurality of regions of interest of an object, without the need for repositioning of the object.

Method and device for controlling rotary table

A distance in a scanning direction between a first set of edges which face each other and exhibit an opposite change between light and dark is measured by an image measuring machine, and a bias correction value is calculated based on a difference between a measured value and a true value. Using the bias correction value, detection point correction values, which are correction values in various directions of edge detection points detected by a scan of a measured object using the image measuring machine, are calculated; a correction amount used in correction of the edge detection points is specified based on the detection point correction value in each direction; and the edge detection points are corrected using the correction amount.

Edge detection bias correction value calculation method, edge detection bias correction method, and edge detection bias correcting program

A light-interference measuring apparatus including: a light source of a broad band light; an objective lens section to branch an optical path of the broad band light into a reference optical path including a reference mirror and a measuring optical path including a measuring object and to output a superposed wave of two branched lights; and an optical path length changing section to change an optical path length of either the reference optical path or the measuring optical path; wherein the objective lens section includes a phase difference control member to control a phase difference between the reference light and the object light to generate destructive interference fringes, and a minimum luminance position detecting section to detect minimum luminance position of the destructive interference fringes.

Light-interference measuring apparatus

A shape measuring method includes guiding light emitted from a light source to an object to be measured and a reference surface, combining light reflected from the object to be measured with light reflected from the reference surface, and taking a distribution image of an interference light intensity corresponding to each measurement position of the object to be measured, while changing an optical path length difference between a first optical path length and a second optical path length over a whole scanning zone, sequentially storing distribution images of the interference light intensity in the whole scanning zone, and obtaining an interference light intensity string at each measurement position based on the stored distribution images of the interference light intensity, and obtaining a position in an optical axis direction at each measurement position of the object to be measured from a peak position of the interference light intensity string.

Shape measuring method and shape measuring apparatus

Disclosed is a slit width adjusting device comprising: a pair of slit members parallel to each other, which is moved to approach each other or to be separated from each other to adjust a slit width; a driving section to move the pair of slit members; an absolute position original point detection section to detect an arbitrary absolute position of the slit members as an original point; and an adjustment section to adjust the slit width, wherein the adjustment section comprises: a storage unit to store a slit width table in which a displacement amount of the slit width from the original point, and a drive instruction value corresponding to the displacement amount, are corresponding to each other; and a drive control unit to extract the drive instruction value corresponding to a specified slit width, to drive the driving section according to the extracted drive instruction value.

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Kanagawa, Japan

Hidemitsu Asano