Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Asm IP Holding B.v. (1 from 1,130 patents)
1 patent:
1. 12033849 - Method for depositing silicon oxide film having improved quality by PEALD using bis(diethylamino)silane