Sony Corporation

Praxair S.t. Technology, Inc.

Hidemasa Tamura

Satoru Uedaira

Hiroshi Yamanoi

Takashi Yamaguchi

Masayuki Suzuki

Yoshimi Makino

Naomi Nagasawa

Norio Yokoyama

Hidetoshi Shimizu

Eiichi Shimizu

Masayuki A Suzuki

Paul S Gilman

Hiroyuki Suzuki

Masaki Saito

Koichi Aso

Chi-Fung Lo

Toshio Mori

Tsutomu Okamoto

Shigeyasu Ito

Hiromichi Taguchi

Reiji Ishikawa

Fumio Sasaki

Yoriko Sameshima

Tetsuya Kojima

A contoured sputtering target includes a target member of sputtering material having a top surface, a bottom surface and an outer peripheral surface. One or more contoured annular regions are formed on the top surface of the target member that extend radially inwardly from the outer peripheral surface and away from the bottom surface. The target member may further include planar, concave or central recessed regions formed in the top surface that are surrounded by the one or more contoured annular regions. The configuration of the target member reduces generation of contaminating particles from nodules that may form near the outer peripheral surface of the target during a sputtering operation. Methods of forming a contoured sputtering target are also disclosed.

Contoured sputtering target

The present invention provides a sputtering target which generates a reduced quantity of particles during a sputtering and a method for producing such a sputtering target. Mirror treatment is carried out to a sputter surface 2 which is sputtered when forming a thin film, so that the sputter surface 2 has an arithmetic mean roughness Ra of 0.01 .mu.m or below. A sputtering target 1 with such a smooth sputter surface 2 having a small surface roughness enables to reduce a number of particles generated during a sputtering.

Sputtering target and production method thereof

Method of manufacturing fine powder of lead stannate

A method for manufacturing fine powders of lead titanate which includes the steps of reacting a water-soluble titanium compound or the hydrolysis product of a titanium compound with a lead compound in an aqueous alkaline solution having a pH value not less than 11.2, at a temperature not less than 100.degree. C. to obtain a precipitate of lead titanate fine powder, and then recovering the lead titanate fine powder from the remaining solution. By adjusting the pH and the synthesis temperature at proper values, it is possible to synthesize different forms of lead titanate, including a perovskite structure, a pyrochlore structure, or acicular (needle-like) crystals with a novel crystal phase. The acicular fine lead titanate crystals have an X-ray diffraction peak at 2.theta.=30.71.degree. using a copper target.

Method for manufacturing fine lead titanate powders

A method for manufacturing dielectric titanate fine powder having the formula Ba.sub.1-x Sr.sub.x TiO.sub.3 wherein 0&lt;x&lt;1 is disclosed, which includes the steps of preparing a hydrolysis product of an inorganic titanium compound TiO.sub.2.xH.sub.2 O by dissolving the inorganic titanium compound in a neutral or alkaline aqueous solution, reacting the hydrolysis product with a water soluble salt of Ba and a water soluble salt of Sr in an aqueous alkaline solution having a pH no less than 13.0 to thereby obtain the dielectric fine powder having the formula Ba.sub.1-x Sr.sub.x TiO.sub.3 wherein 0&lt;x&lt;1, and filtering the fine powder from the remaining solution.

Method for manufacturing dielectric fine powder of Ba.sub.1-x Sr.sub.x

A method of producing bismuth titanate fine powders comprising hydrolysis product of an inorganic titanium compound or water soluble titanium salt, reacting the solution with water soluble bismuth compound in an aqueous alkaline solution having pH value between 14.0 and 14.9, and filtering and washing the resulting precipitates from the solution. Further, a method of producing bismuth titanate fine powder comprising the steps of, preparing an aqueous solution containing hydrolysis product of titanium compound or water soluble titanium salt, reacting the solution with water soluble bismuth compound in an aqueous alkaline solution having pH value between 14.1 and 14.85 at a temperature not lower than 150.degree. C. When the reaction is to be carried out at an ambient pressure, it can be carried at a temperature higher than 50.degree. C. and lower than the boiling point of the solution at the ambient pressure. The precipitate resulting from the reaction is filtered and heat-treated to fine powders of bismuth titanate Bi.sub.4 Ti.sub.3 O.sub.12. When the reaction of the solution is carried out in an autoclave and at higher than 150.degree. C., it is possible to directly obtain the fine powders of bismuth titanate of the orthorhombic structure.

Method of producing bismuth titanate fine powders

A ceramic composition having the general formula:

Ceramic substrate of Na.sub.2 O and Ta.sub.2 O.sub.5 for thin film

A ceramic composition particularly useful for use in thin film magnetic heads, the composition having the general formula:

Ceramic substrate of Na.sub.2 O and Nb.sub.2 O.sub.5 for magnetic metal

A method of manufacturing fine powder of BaZrO.sub.3 is described, in which a zirconium compound is first hydrolyzed. The hydrolyzed zirconium compound is then reacted with a water-soluble barium compound in a strongly alkaline solution having a pH not lower than 13.6.

Method for manufacturing fine powder of barium zirconate

A method for manufacturing dielectric metal titanate MTiO.sub.3 where M represents Ba and Sr is disclosed, which comprises the steps of preparing aqueous alkaline solution containing at least one metal salt selected from the group of barium and strontium and immersing metal titanium into the solution to form the metal titanate MTiO.sub.3 where M is at least one of barium and strontium. Further, there is disclosed a method for manufacturing dielectric metal titanate MTiO.sub.3 where M represents Ba and/or Sr which comprises the steps of preparing aqueous solution containing at least one metal salt selected from the group of barium and strontium, forming a metal titanium layer on a substrate, and immersing the substrate with the metal titanium layer into the solution to convert the metal titanium layer into the dielectric metal titanate MTiO.sub.3 where M is at least one of barium and strontium.

Method for manufacturing dielectric metal titanate

A lithium-manganese dioxide cell comprising a cathode composed of manganese dioxide, an anode composed of metal lithium and an electrolyte interposed therebetween. The manganese dioxide having an X-ray diffraction peak in the vicinity of a diffraction crystal lattice distance d=3.60 .ANG. analyzed after discharging in a cell. The manganese dioxide may be prepared by the steps of adding nitric acid to electrolytic manganese (EMD), chemical manganese dioxide (CMD), a product obtained by heat-treatment of EMD or CMD, a product obtained by thermal decomposition of EMD or CMD, or a product by thermal decomposition of manganese nitrate, and heat-treating the resulting mixture.

Lithium-manganese dioxide cell

A method for manufacturing fine powder of SrZrO.sub.3 is described in which a hydrolyzate of a Zr compound and an Sr compound are reacted with each other in a strongly alkaline aqueous solution to obtain fine powder of SrZrO.sub.3.

Method for manufacturing fine powder of SrZrO.sub.3

A method of manufacturing metal titanate fine powder which is represented as MTiO.sub.3 wherein M is one of Ba, Sr and Ca is disclosed which includes the steps of preparing hydrolyzed compound of titanium compound and reacting the hydrolyzed compound of titanium compound with water soluble metal salt of one of Ba, Sr and Ca in an aqueous alkaline solution having pH not less than 13.

Method of manufacturing metal titanate fine powder

A method for manufacturing rotary ball display devices wherein a plurality of such balls are provided with a coating of a color different from the remainder of the ball, the ball members are coated with a thin coating insoluble in the settling medium into which they are introduced, so that upon settling into a low viscosity liquid, they form a uniform layer. A high molecular weight hardenable coating material which is soluble in the low viscosity liquid is then poured onto the coated ball members to cover the layer. Then, the low viscosity liquid is removed and the hardenable coating material is caused to harden. The thin coating is then dissolved away from portions of the ball members to leave cavity portions thereabout into which a high resistivity liquid is introduced. The resulting ball members have a refractive index on the colored layer which is substantially the same as the refractive index of the high resistivity liquid contained in the cavities.

Method of making a rotary ball display device

The slide member is composed of a polymer composite material containing an unsaturated polyester resin, a thermoplastic resin and a granular inorganic filler. The slide member is of a double construction the surface of which is removed so as to expose part of the surface of the inorganic filler. The slide member thus constructed has particularly a favorable tape travelling property because it has a low friction coefficient, as well as the favorable properties inherent in the polymer composite material.

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Kanagawa, Japan

Hidemasa Tamura