Renesas Electronics Corporation

Hideki Sugiyama

Hiraku Chakihara

Yoshiyuki Kawashima

Kentaro Saito

Hideki Hara

Semiconductor device includes a well region formed in an active region of a semiconductor substrate, a gate electrode formed on the well region via a gate dielectric film, and a source region and a drain region formed in the well region. At the vicinity of both end portions of the active region in the first direction, a first region and a second region having the same conductivity type as the well region and having impurity concentration higher than that of the well region are formed in the well region. The first region and the second region are spaced from each other in a second direction perpendicular to the first direction, and at least a portion of each of them is located under the gate electrode. The first region and the second region are not formed at the center portion of the active region in the first direction.

Semiconductor device including a MISFET and method of manufacturing the same

In a semiconductor device, a memory cell is formed of a control gate electrode and a memory gate electrode adjacent to each other, a gate insulating film formed below the control gate electrode and an insulating film formed below the memory gate electrode and having a charge accumulating part therein. Also, in this semiconductor device, a capacitive element is formed of a lower electrode, an upper electrode and a capacitive insulating film formed between the upper electrode and the lower electrode. A thickness of the lower electrode is smaller than a thickness of the control gate electrode.

Semiconductor device and manufacturing method thereof

A nonvolatile semiconductor memory comprises a first memory cell transistor, a second memory cell transistor, a connection layer, protrusion portions and a contact portion. The first memory cell transistor comprises a first gate electrode formed above a first channel region, and a second gate electrode formed on a side of the first gate electrode through an insulating film. The second memory cell transistor comprises a third gate electrode formed above a second channel region, and a fourth gate electrode formed on a side of the third gate electrode through an insulating film and facing the second gate electrode. The connection layer connects the second gate electrode and the fourth gate electrode. The protrusion portions are formed of a material different than that of the second and fourth gate electrodes, and are formed on both ends of the connection layer. The contact portion is formed on the connection layer.

Growing community of inventors

Tokyo, Japan

Hideki Sugiyama