Average Co-Inventor Count = 4.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Screen Holdings Co., Ltd. (1 from 1,111 patents)
2. Screen Semiconductor Solutions Co., Ltd. (1 from 49 patents)
1 patent:
1. 9436087 - Substrate processing apparatus with a cleaning processing section for cleaning a chemical liquid processing section