Edwards Japan Limited

Seiko Instruments Inc

Hideki Omori

Yoshiyuki Sakaguchi

Kengo Saegusa

Yanbin Sun

Takashi Kabasawa

The present disclosure provides a vacuum pump with which size and weight reduction, improvement of workability, and cost reduction can be realized. Electrical connection between a pump main body that has a rotor supported by a magnetic bearing and a control unit that controls the drive of the pump main body is established by a flexible printed wiring board configured by printing an electric circuit on a surface of a sheet-like insulating substrate.

Vacuum pump

Provided is a vacuum pump apparatus which allows reductions in thickness, weight, size, and cost of a vacuum pump control device. In the vacuum pump apparatus, a pump main body unit and a control unit which controls driving of the pump main body unit are integrated with each other. The vacuum pump apparatus has a configuration in which a spacer configured to support a load applied to a housing of the control unit is provided between a base of the pump main body unit and the housing of the control unit.

Vacuum pump apparatus, and pump main body unit, control unit, and spacer each for use in vacuum pump apparatus

A vacuum pump includes a regenerative resistor removed from the control apparatus and disposed in the vacuum pump. More specifically, the regenerative resistor is detached from a control board (control apparatus) on which a control circuit is mounted, and disposed in a base of the vacuum pump, and connected to the control board via a wire. Further, a gap is provided between the base of the vacuum pump and the control apparatus. Moreover, a cover (outer covering body) is provided in the regenerative resistor disposed in the base part of the vacuum pump and the wire part. Since the regenerative resistor is provided in the base of the vacuum pump, which has a large heat capacity, a temperature increase of the control apparatus is reduced.

Vacuum pump and control apparatus associated with vacuum pump

A vacuum pump has a hermetic connector disposed on a base of a body of the vacuum pump. The hermetic connector has a plurality of pins connected to a plurality of electrical cables leading to the inside of the pump body. The connector is longer in a lateral direction than in an axial direction so that the connector is horizontally long in a circumferential direction of the pump body.

Vacuum pump, and connector and control device applied to vacuum pump

An electromagnetic rotating apparatus may include an electromagnet winding that consumes power generated during regeneration. A motor voltage monitoring circuit detects that a voltage at a motor driving main circuit is higher than a voltage during normal operation, due to overshoot or the like after arrival at a set speed during deceleration or acceleration of a motor. The motor voltage monitoring circuit transmits a high-voltage detection signal to a braking current adjusting circuit and a magnetic bearing control circuit. Upon receiving the high-voltage detection signal, the braking current adjusting circuit reduces a braking current command value for the motor so as to maintain an excitation voltage for the motor constant or reduce this excitation voltage, and an amplifier control circuit in the magnetic bearing control circuit increases a bias current flowing through an electromagnet winding to increase power consumption.

Electromagnetic rotating device and vacuum pump equipped with electromagnetic rotating device

An object of the present invention is to improve, using a simple configuration, heat dissipation of a regenerative resistor that is disposed in a vacuum pump control device (controller) connected to a vacuum pump. The regenerative resistor disposed in the vacuum pump control device is stored in an aluminum die-cast casing. More concretely, a housing of the vacuum pump control device is prepared by aluminum die casting (metal mold casting). A regenerative resistor storing portion (aluminum die-cast casing) provided with a hollow portion is provided on a top panel of the aluminum die cast, the hollow portion being designed to have a size accommodating the entire regenerative resistor. The regenerative resistor is fitted into the hollow portion, and an opening section of the hollow portion is sealed with an aluminum sheet of the same material as that of the casing. In this manner, the regenerative resistor can removably be stored in the aluminum die-cast casing.

Vacuum pump control device and vacuum pump

To provide a magnetic bearing control device that identifies a movable range of an eddy current gap sensor configuring a magnetic bearing and a center of the movable range and easily controls a rotor shaft and other controlled shafts, which are lifted by the magnetic bearing, in a central position of a protective bearing. The magnetic bearing control device has a first function for detecting an X-axis direction movable limit position of the rotor shaft; a second function for identifying a center of an X-axis movable range of an X-axis eddy current gap sensor (&#x2212;X sensor, +X sensor) based on the X-axis direction movable limit position detected by the first function; a third function for detecting a Y-axis direction movable limit position of the rotor shaft; a fourth function for identifying a center of a Y-axis movable range of a Y-axis eddy current gap sensor (+Y sensor, &#x2212;Y sensor) based on the Y-axis direction movable limit position detected by the third function; and a fifth function for turning an excitation current of a Y-axis electromagnet (+Y electromagnet, &#x2212;Y electromagnet) OFF when the first function detects the X-axis direction movable limit position and the second function identifies the center of the X-axis movable range, and turning an excitation current of an X-axis electromagnet (+X electromagnet, &#x2212;X electromagnet) OFF when the third function detects the Y-axis direction movable limit position and the fourth function identifies the center of the Y-axis movable rage.

Magnetic bearing control device and exhaust pump having magnetic bearing control device

The present invention provides a turbo molecular pump capable of suppressing temperature rise in an electronic circuit section within a range, without losing airtight property thereof with a simple construction. In a base section of a turbo molecular pump, a bottom portion thereof is sealed by a bottom cover. A semiconductor device is disposed at the inner portion of the bottom cover. A cooling member is provided, which is used for releasing heat of the semiconductor device in an airtight state outside the bottom cover.

Growing community of inventors

Chiba, Japan

Hideki Omori