Tokyo Electron Limited

Other

Ckd Corporation

Fujikin Inc.

Hideki Nagaoka

Hiroshi Koizumi

Jun Hirose

Nobukazu Ikeda

Kouji Nishino

Ryousuke Dohi

Eiji Ideta

Satoshi Kagatsume

Tadahiro Ohmi

Takashi Hirose

Tomio Uno

Michio Yamaji

Atsushi Matsumoto

Akihiro Morimoto

Yukio Minami

Kazuhiko Sugiyama

Hiroki Endo

Keiki Ito

Toyomi Uenoyama

Tsuyoshi Shimazu

Katsunori Yonehana

Kazuo Fukazawa

Daisuke Hayashi

Cai Zhong Tian

Jun Ooyabu

Kazuo Fukasawa

Minoru Ito

Hiroki Doi

Masakazu Ban

Sunao Muraoka

Kazuhiro Yoshikawa

Tsuneyuki Okabe

Hiroshi Itafuji

Shuji Moriya

Takashi Kitazawa

Kazuyuki Miura

Seiichi Iida

Tetsujiro Kono

Osamu Katsumata

A gate valve includes a plate-shaped valve element which is rectangular-shaped to suit the shape of an opening of a processing chamber and has a size larger than the opening. A hermetically sealing member to perform hermetic sealing by abutting on and being pressed against an outer side of the processing chamber is provided in the valve element. A microwave reflecting mechanism which is formed in a groove shape so as to surround a periphery of the hermetically sealing member is provided at an outer peripheral portion of the hermetically sealing member.

Microwave plasma processing device and gate valve for microwave plasma processing device

A partial pressure control systemincludes two valveswhich are branched from an operation gas supply pipeand which variably control operation gas, pressure sensorswhich are respectively connected to the each valvesin series and which detect pressure of the operation gas, and a controllerwhich proportionally controls the operation of the valvesbased on detection result of the pressure sensors, thereby relatively controlling pressures Pand Pof the two valves. With this configuration, it is possible to reduce wastefull consumption of the operation gas, and to enhance the responsivity with respect to change of setting and the like.

Flow rate control system and shower plate used for partial pressure control system

A gas supply unit and a gas supply system that are small-sized and inexpensive. The gas supply unit is installed on operation gas conveyance pipeline and has fluid control devices communicated via flow path blocks and controlling operation gas. The gas supply unit has the first flow path block, to one side of which an inlet open/close valve included in the fluid control devices is attached, and also has the second flow path block, to one side of which a purge valve included in the fluid control devices is attached. The first flow path block and the second flow path block are layered in the direction perpendicular to the conveyance direction of the operation gas. The inlet open/close valve and the purge valve are arranged between a mass flow controller installed on the operation gas conveyance pipeline and an installation surface where the unit is installed.

Gas supply unit and gas supply system

Partial pressure control system, flow rate control system and shower plate used for partial pressure control system

Provided is a relative pressure control system has a simple configuration, but enables accurate regulation of a division ratio of an operation gas, and concurrently makes it possible to securely drain the operation gas from an operation gas pipeline in case of emergency. The system includes a plurality of air operated valves of a normally open type that are connected to an operation gas pipeline supplied with an operation gas; pressure sensors that are series connected to the respective air operated valves and that detect output pressures of the respective air operated valves; a controller that controls operation pressures of the respective air operated valves in accordance with the pressures detected by the pressure sensors; and a hard interlock solenoid valve that correlates the plurality of air operated valves to one another so that at least one of the plurality of air operated valves is normally opened. In the configuration, an opening of a specified one of the plurality of air operated valves is regulated, the operation gas is output at a predetermined division ratio.

Relative pressure control system and relative flow control system

A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time &#x394;t from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

Parallel divided flow-type fluid supply apparatus, and fluid-switchable pressure-type flow control method and fluid-switchable pressure-type flow control system for the same fluid supply apparatus

A fluid supply apparatus with a plurality of flow lines branching out from one pressure regulator with the flow lines arranged in parallel and constructed so that opening or closing one flow passage will have no transient effect on the steady flow of the other flow passages. Each flow passage is provided with a time delay-type mass flow controller MFC so that when one closed fluid passage is opened, the mass flow controller on that flow passage reaches a set flow rate Qs in a specific delay time At from the starting point. The invention includes a method and an apparatus in which a plurality of gas types can be controlled in flow rate with high precision by one pressure-type flow control system.

A construction for mounting a pressure detector prevents the detector diaphragm from being strained by stress applied to the pressure detector as the detector is mounted in a fixture main body provided in a pipe line or the like, thereby keeping the output characteristics and temperature characteristics of the detector from greatly differing before and after the mounting. The pressure detector is constructed by combining and fastening together a diaphragm base having a diaphragm and a sensor base having a sensor element therein that is activated by displacement of the diaphragm base. The pressure detector, with a gasket placed thereunder, is disposed in a mounting hole of a fixture main body that is mounted in a pipe line. The pressure detector is air-tightly pressed and fastened by a presser member inserted from above in the mounting hole. The presser member is brought in contact with a block upper surface of the diaphragm base, and the gasket is also brought in contact with the block lower surface of the diaphragm base. A shallow groove is defined in the form of a ring on the lower surface of the block at a place inward of the portion contacting the metal gasket so that the shallow groove absorbs strain caused by the presser member.

Structure or construction for mounting a pressure detector

A method of detecting abnormalities in flow rate in pressure-type flow controller. The method checks the flow rate for abnormalities while controlling the flow rate of fluid in a pressure-type flow controller FCS using an orifice&mdash;the pressure-type flow controller wherein with the upstream pressure P maintained about two or more times higher than the downstream pressure P , the downstream flow rate Q is calculated by the equation Q &equals;KP (K: constant) and wherein the control valve CV is controlled on the basis of the difference signal Q between the calculated flow rate Q and the set flow rate Q .

Method of detecting abnormalities in flow rate in pressure-type flow controller

Growing community of inventors

Nirasaki, Japan

Hideki Nagaoka