Tomoegawa Co., Ltd.

Tomoegawa Corporation

Emd Corporation

Shoei Printing Co., Ltd.

Hideki Moriuchi

Shuhei Hatano

Katsuya Okumura

Tomohiro Nakata

Akinori Ebe

Ritsu Kawase

Chikara Murata

Tomoki Furue

Kazuya Ohishi

Hajime Tsuda

Daisuke Muramatsu

Masanori Takahata

Taku Kurahara

Hiroshi Kitahara

Masaomi Kuwabara

Tatsunari Inoue

Masanori Morinaga

Kazuki Ishihara

A radio-frequency antenna through which a high amount of current can be efficiently passed even at a radio-frequency level for plasma generation, as well as a plasma processing device utilizing the radio-frequency antenna. A radio-frequency antenna includes a metal fiber sheet. A plasma processing device includes: a vacuum container including a wall having an opening; a radio-frequency antenna including a metal fiber sheet and located at the opening; and a dielectric protection plate located closer to the interior of the vacuum container than the radio-frequency antenna and configured to close the opening in a gas-tight manner. The radio-frequency antenna including a metal fiber sheet has a larger surface area and a lower impedance to a radio-frequency current than a radio-frequency antenna including a metal plate having the same outer shape. Therefore, it allows a radio-frequency current commonly used for plasma generation to be more efficiently passed through in large amounts.

Radio-frequency antenna and plasma processing device

The present invention provides a temperature control unit capable of efficiently controlling a temperature of a specific object with reduced risk of failure of electronic components due to leakage of a temperature control medium. The temperature control unit (), which controls a temperature of a specific object, contains a temperature control medium, and a metal fiber sheet () that is formed with a space serving as a channel of the temperature control medium. The latent heat of evaporation of the temperature control medium is within the range of from 70 to 200 kJ/kg when the temperature control medium changes the state from a liquid state to a gaseous state. The volume expansion rate of the temperature control medium is at most 250 times when the temperature control medium changes the state from a liquid state to a gaseous state under atmospheric pressure.

Temperature control unit and temperature control device

A temperature control unit includes: a substantially flat-plate-shaped placement section () configured to support a heat transfer target; a heating section () configured to heat a heat transfer target placed on the placement section (); and a heat transfer section () disposed in contact with at least one of the placement section () and the heating section (), the heat transfer section () being at least partially formed of a metal porous structure.

Temperature control unit

Provided is a heat storage unit having a simple configuration, capable of being attached to various objects, and capable of efficiently performing heat exchange. The heat storage unit has at least one inorganic fiber member configured by binding or entangling flexible inorganic fibers and having a desired shape; and

Heat storage unit

With an objective of obtaining a temperature control unit capable of highly uniform temperature control, provided is a temperature control unit () having a heat transfer medium introduction port () configured to introduce a heat transfer medium from outside, a temperature control mechanism () through which the heat transfer medium from the heat transfer medium introduction port () passes, and a heat transfer medium discharge port () configured to discharge the heat transfer medium from the temperature control mechanism () to outside, wherein: the temperature control mechanism () is provided with a porous metal body and a housing () configured to house the porous metal body; at least one main surface of the housing () is exposed to an outer side of the temperature control mechanism (), and an inner side of the main surface contacts the porous metal body, thereby exchanging heat between the porous metal body and outside; and a heat transfer medium dispersion area () is provided between the heat transfer medium introduction port () and the porous metal body.

A resin card medium which has a substrate having electronic components mounted thereon and has sophisticated flatness and smoothness realized without providing any layer having holes for absorbing thicknesses of the electronic components; and a method for manufacturing a resin card medium. A resin card medium laminated body before pressing is prepared by laminating, on a first plastic finishing sheet, a substrate having one electronic component or two or more electronic components installed on one side of the substrate, with the one side, on which the electronic component or electronic components are installed, facing upward, and laminating, on the substrate, mixed paper constituted of plastic fibers and plant fibers, and by subjecting the resin card medium laminated body to hot pressing at a temperature which is a softening point or more of the plastic fibers and less than a melting point of the plastic fibers.

Resin card medium and manufacturing method therefor

A thermoplastic fiber sheet includes at least cellulosic fibers and thermoplastic resin fibers having a softening temperature of 100 to 140&#xb0; C. A weight ratio of the cellulosic fibers to the thermoplastic resin fibers (the cellulosic fibers: the thermoplastic resin fibers) is 4:6 to 2:8, and porosity is 20 to 70%.

Thermoplastic fiber sheet

One object of the present invention is to provide a metal fiber nonwoven fabric having high homogeneity, and the present invention provides a metal fiber nonwoven fabric in which metal fibers are bonded to each other having a coefficient of variation (CV value) of a basis weight in accordance with JIS Z 8101 (ISO 3534: 2006) per 1 cmof 10% or less.

Metal fiber nonwoven fabric

An optical layered product has a translucent substrate having at least an optically functional layer, containing translucent microparticles, provided directly or via another layer onto one or both sides of the substrate. The standard deviation of area dispersion variability of the translucent microparticles in the optically functional layer is in the range of 0.04 to 0.20.

Growing community of inventors

Shizuoka, Japan

Hideki Moriuchi