Canon Kabushiki Kaisha

Matsushita Electric Industrial Co., Ltd.

Hideki Matsumoto

Toshiyuki Karakama

Kazushige Sakurai

Keiji Okano

Katsuhiro Kojima

Kazushi Watanabe

Toru Oguma

Kenji Matsuda

Masaki Ojima

Seiji Yamaguchi

Norihito Naito

Takeo Shoji

Minoru Matsuguma

Fumio Sakai

Hiroyuki Baba

Masahiro Yoshida

Isao Ikemoto

Noriyasu Hasegawa

Akiyoshi Yokoi

Koichi Suwa

Kouichi Suwa

Shirou Sakata

Atsushi Numagami

Hiroshi Sato

Daisuke Abe

Masaru Shimura

Seiji Saito

Hiroaki Sakai

Satoshi Sunahara

Atsuya Takahashi

Makoto Mizuno

Takahiro Inoue

Yoshimasa Araki

Yuichi Iwasaki

Tomomi Kakeshita

Hisashi Namba

Takashi Hibi

Shunsuke Ota

Nobuto Kawahara

Kohei Suzuki

Takao Nakagawa

Ken Katsuta

Tadashi Onimura

Yasushi Sugiyama

Kohei Wakabayashi

Shinji Shimazaki

Yukihiro Yokota

Katsuyuki Tsuji

Yoshihiro Omameuda

Tomonobu Saku

Harumi Aoki

Shin Takano

Toshiharu Saitoh

An ejection material filling device fills an ejection material into a first storage space of an ejection material ejecting device including an ejection head configured to eject the ejection material and a storage container having an internal space separated by flexible membrane into the first storage space storing the ejection material and a second storage space storing a hydraulic fluid. The ejection material filling device includes an ejection material server bottle storing the ejection material to be filled into the first storage space, pipes configured to form a circulation path including the ejection material server bottle and the first storage space, a pump configured to circulate the ejection material through the circulation path, and a particle filter provided in the circulation path.

Ejection material filling device, pressure regulation device, and ejection material filling method

The present invention provides a lamp device comprising: a glass tube configured to cover a discharge space in which a pair of electrodes are arranged so as to face each other; and a bayonet cap portion provided in an end portion of the glass tube and electrically connected to one electrode of the pair of electrodes, wherein the bayonet cap portion is formed to have a shape including a bottom surface and a peripheral surface, and includes, in the bottom surface, a first opening configured to supply a gas to an inside of the bayonet cap portion and a second opening configured to exhaust the gas from the inside of the bayonet cap portion.

Lamp device, exposure apparatus, and method of manufacturing article

An ejection device is used for an imprint apparatus that presses a mold against an ejection material ejected onto a substrate to form a pattern. The ejection device includes: a housing unit having an ejection head configured to eject the ejection material onto the substrate, and housing configured to accommodate the ejection material; and a control unit configured to control processing of the ejection device. The control unit switches the processing according to a usage status of a consumable part included in the housing unit.

Ejection-material ejection device, information processing apparatus, and control method of ejection-material ejection device

An imprint apparatus includes a nozzle including a discharge outlet which discharges imprint material onto the substrate, a supply unit configured to supply a gas which accelerates filling of a pattern of a mold with the imprint material, and a gas unit provided with the nozzle. The gas unit performs gas supply or exhaust with respect to a second space around a first space between the nozzle and a portion of the substrate which faces the nozzle and is conveyed under the nozzle in order to suppress the gas from flowing into the first space.

Imprint apparatus and method of manufacturing article

An imprint apparatus for transferring a pattern to an imprint material using a mold includes a substrate holding mechanism and a control unit. The substrate holding mechanism is configured to be divided into a plurality of areas, capable of varying an attracting force for attracting the substrate in each of the areas and to hold the substrate. The control unit is configured to, when a plurality of shots is formed on the substrate, control an imprint operation of transferring the pattern to the plurality of shots which are not adjacent to one another, makes the attracting force in the area of the substrate holding mechanism corresponding to the shot to which the pattern is transferred among the plurality of areas smaller than the attracting force at the time of the imprint operation and suck the substrate.

Imprint apparatus, imprint method, and method for producing device

An immersion-type exposure apparatus includes a measurement area for measuring a substrate, an exposure area, which differs from the measurement area, for exposing the substrate via a projection optical system, plural stages configured to hold the substrate and to be movable between the exposure area and the measurement area, and a controller configured to control the driving of the plural stages, wherein in a case that one stage of the plural stage is positioned in the exposure area, and immersion liquid that is supplied onto the one stage is retained in exposure area and delivered to another stage, the controller is configured to determine a delivery position of the immersion liquid for the other stage based on at least a first processing position of the other stage.

Exposure apparatus and device manufacturing method

A method of performing an imprint process on each of a plurality of shot regions of a substrate, wherein each shot region includes at least one of at least one valid chip area and at least one invalid chip area, the invalid chip area including an inhibited area in which resin coating is inhibited, the imprint process for a shot region including both the invalid chip area and the valid chip area includes coating the valid chip area of the shot region with the resin, bringing a pattern surface of a mold into contact with the resin, and curing the resin, and in the step of coating, at least the inhibited area of the invalid chip area is not coated with the resin.

Imprint method, imprint apparatus, and article manufacturing method

The present invention provides an apparatus including a calculating unit which calculates a first time serving as a time required to drive a stage in a non-scanning direction perpendicular to a scanning direction, and a second time serving as a time required to drive the stage in the scanning direction, both of which range from when exposure of one of the plurality of shot regions ends until exposure of the next shot region starts, and an adjusting unit which adjusts, when the first time is longer than the second time, one of a time for which an acceleration of the stage nonlinearly changes in the process of reversing the scanning direction, and a settling time taken for the stage to settle from when acceleration of the stage ends until exposure starts, so that the second time becomes longer than the first time in driving the stage in the scanning direction.

Exposure apparatus and device fabrication method

An image forming apparatus has: a photosensitive drum onto which images are formed; and a primary transfer roller which sequentially forms the color images onto the photosensitive drum by using a plurality of developing devices having different color developers and transfers the color images formed on the drum onto a transfer member or a recording medium. Order of forming the images onto an image bearing member on a photosensitive member is switched based on a use amount of each of the plurality of developing devices.

Image forming apparatus and control method of the image forming apparatus

An image forming apparatus includes an image bearing member; a charging member for contacting a peripheral surface of the image bearing member to electrically charge the peripheral surface; a first developing device for forming a first developed image on the peripheral surface of the image bearing member charged by the charging member; a second developing device for forming a second developed image on the peripheral surface, wherein a combined developed image is formed by superimposing the first developed image and the second developed image on a common transfer material, wherein when the combined image is being formed, the charging member is cleaned by transferring, by an electric field, material deposited on the charging member to a region between the first developed image and the second developed image on the peripheral surface of the image bearing member, and wherein the first developed image and the second developed image are not formed in the region.

Image forming apparatus with charging member cleaning capabilities

The developing apparatus which develops a latent image formed on an photosensitive drum by a toner is provided with a developing roller which bears the toner, and an RS roller abutting against to this developing roller so as to perform the removal and supply of the toner on the photosensitive drum, and at the same time, is provided with adjusting means which adjusts a pushed-in amount for the developing roller of the RS roller according to the characteristic of the RS roller.

Developing apparatus and image forming apparatus, and storage apparatus

A unit includes cartridge electrical contacts provided at respective ends of the cartridge in a longitudinal direction and electrically connecting with body electrical contacts when the cartridge is properly mounted to the image forming apparatus. The cartridge electrical contacts are electrically connected to each other. Mounting the cartridge to the image forming apparatus forms a detection circuit via the cartridge.

Electrophotographic image forming apparatus and unit

A developing device develops an electrostatic latent image formed on an electrophotographic photosensitive member. The developing device is mountable to a main assembly of an electrophotographic image forming apparatus. The developing device includes a developer carrying member for feeding a developer to the electrophotographic photosensitive member to develop the electrostatic latent image formed on the electrophotographic photosensitive member, a first electroconductive portion, a second electroconductive portion for cooperating with the first electroconductive portion to provide an electrostatic capacity, a first electrical contact for receiving a voltage to be applied to the first electroconductive portion from the main assembly of the electrophotographic image forming apparatus, and a second electrical contact for transmitting, to the main assembly of the electrophotographic image forming apparatus, an electric signal corresponding to an electrostatic capacity between the first electroconductive portion and the second electroconductive portion when a voltage is applied to the first electroconductive portion to detect a remaining amount of the developer by the main assembly of the electrophotographic image forming apparatus.

Image developing apparatus, process cartridge, electrophotographic image forming apparatus, and developing unit frame

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Utsunomiya, Japan

Hideki Matsumoto