Hitachi-high-technologies Corporation

Hitachi High-tech Corporation

Nec Toppan Circuit Solutions, Inc.

Hideki Kikuchi

Ruriko Tsuneta

Toshie Yaguchi

Hideo Kikuchi

Hideo Kashima

Hidekazu Suzuki

Yoshifumi Taniguchi

Isao Nagaoki

Hirokazu Tamaki

Takafumi Yotsuji

Takashi Dobashi

Keitaro Watanabe

Yutaka Akimoto

Kazuhiro Kinoshita

Toshiyuki Kaneko

Kiyoshi Yabata

Tadao Furutsu

Katsuyuki Minakawa

Akinari Hanawa

Kouichirou Saitou

Kiyohiko Kaiya

Ryoji Namekawa

Naotomo Maruyama

An object of the invention is to provide a technique of capturing images at higher speed and higher magnification when acquiring continuous tilted images with an electron microscope. The electron microscope of the invention includes a first spherical receiver fixed to a column of the electron microscope and configured to slide with a spherical fulcrum provided at a tip end of a sample holder; a spherical surface part provided on the column; and a second spherical receiver provided outside the column. The spherical surface part and the second spherical receiver slide on a contact part between the spherical surface part and the second spherical receiver, and a track of the slide is along a spherical surface centered on a central axis of the first spherical receiver, so that a view shift and a focus shift from an observation position of a sample can be reduced.

Electron microscope

A charged particle beam device wherein a transmission image corresponding to an arbitrary diffraction spot or a diffraction pattern corresponding to a partial range in the transmission image are easily and automatically captured. A charged particle beam device having: an image-capturing unit for forming an image of a sample; a diaphragm disposed in the image-capturing unit, a plurality of openings having different sizes for transmitting an electron beam from the sample being formed in the diaphragm; a movement unit for varying the position of the diaphragm; and a display unit for displaying the formed image, wherein when the operator selects, e.g., a diffraction spot (A) on the display unit, the movement unit moves the diaphragm from the positional relationship between the diaphragm and the image in accordance with the position of the diffraction spot (A).

Charged particle beam device for moving an aperture having plurality of openings and sample observation method

In a side entry type sample holder, vibrations in the radial direction of the sample holder provoke a resolving power decrease in the measurement results. In the present invention, the side entry type sample holder has a stepped portion in the radial direction of an axial portion. The sample stage has a support part contacting the stepped portion in a cylindrical portion capable of moving as one body in the axis direction of the sample holder, and, through the contact between the stepped portion and the support part, a frictional force is generated, opposing the radial direction of the axial portion in the sample holder. In this manner, the vibrations in the radial direction of the sample holder are suppressed, and the resolving power decrease in the measurement results is suppressed.

Charged particle beam device

The electric charged particle beam microscope includes an electric charged particle source; a condenser lens converging electric charged particles emitted from the electric charged particle source on a specimen; a deflector scanning the converged electric charged particles over the specimen; a control unit of the deflector; a specimen stage on which the specimen is mounted; a detector detecting the electric charged particles; a computer forming an image from a control signal from the deflector and an output signal from the detector; and a display part connected with the computer. The control unit of the deflector can change the scan rate of the electric charged particles. A first rate scan image is obtained at a first rate and a second rate scan image is obtained at a second rate slower than the first rate.

Electric charged particle beam microscope and electric charged particle beam microscopy

An apparatus that can capture a rotation series of images of an observation area within a range of &#x2212;180&#xb0; to +180&#xb0; around the x axis thereof, and can capture a rotation series of images of the observation area within a range of &#x2212;180&#xb0; to +180&#xb0; around the y axis thereof. The apparatus includes a sample mounting base having at its tip portion a mounting portion for mounting a sample thereon; a rotating jig having a mounting base holding portion that holds the sample mounting base; a sample holding rod that includes a holding portion that holds the rotating jig; a first rotation control unit that applies, to the sample holding rod, a first rotation within a range of &#x2212;180&#xb0; to +180&#xb0; with the extending direction of the sample holding rod as the axis thereof; and a second rotation control unit that applies, to the rotating jig, a second rotation within a range of &#xb1;45&#xb0; or more with the direction orthogonal to the rotation axis of the first rotation as the axis thereof, the sample mounting base being in a conical or polygonally conical form.

Charged particle beam microscope, sample holder for charged particle beam microscope, and charged particle beam microscopy

The present invention relates to the acquisition of tilted series images of a minute sample in a short time. The present invention relates to: measuring in advance the relation between an amount of focus shift and a degree of coincidence at the time of acquiring tilted series images; calculating backwards a focus shift from the degree of coincidence on the basis of this relation; correcting the focus shift by controlling a stage, an objective lens, and the like; and thus acquiring the tilted series images. In addition, the present invention relates to: acquiring a reference image in advance at the time of photographing the tilted series images; obtaining the correlation between an acquired image and the reference image; and performing, if the degree of coincidence is equal to or smaller than a set value, processing such as the transmission of a warning message and the stop of an image acquisition sequence. According to the present invention, it becomes possible to perform focusing at the time of photographing the tilted series images at high speed, so that the length of time for photographing the tilted series images can be shortened. In addition, an image inappropriate for three-dimensional reconstruction can be removed. This makes it possible to enhance the throughput of failure analysis of a semiconductor and an advanced material.

Charged corpuscular ray apparatus

An electric charged particle beam microscope is provided in which a specimen movement due to a specimen rotation is classified into a repeatable movement and a non-repeatable movement, a model of movement is determined for the repeatable movement, a range of movement is determined for the non-repeatable movement, the repeatable movement is corrected on the basis of the movement model through open-loop and the non-repeatable movement is corrected under a condition set on the basis of the range of movement.

Electric charged particle beam microscope and microscopy

Occurrence of EMI is reduced without a sharp increase of the manufacturing cost by suppressing a common mode current stably. There is provided a disclosed printed-circuit board being adapted such that a width of an outer edge section of a T-shaped pattern is widened so as to surround a recessed section with a frame-shaped additional electric conductor by electrically connecting the frame-shaped additional electric conductor with the T-shaped pattern making up a ground pattern so as to close the recessed section.

Printed-circuit board, coaxial cable, and electronic device

Growing community of inventors

Tokyo, Japan

Hideki Kikuchi