Seiko Epson Corporation

Hideki Hahiro

Masao Nakayama

Tetsuji Fujita

Yasutaka Imai

Koichiro Akasaka

Michifumi Nagawa

Hideto Izumi

Takafumi Noda

Noboru Furuya

Atsushi Ito

A light emitting apparatus according to the present disclosure includes a first layer made of a semiconductor monocrystal, a second layer provided at the first layer and having a crystal orientation not continuous with the crystal orientation of the first layer, and a columnar crystal structure including a light emitting layer and extending from the second layer.

Light emitting apparatus, method for manufacturing light emitting apparatus, and projector

A method of manufacturing a light source device includes the steps of providing a mask layer to a substrate, providing the mask layer with a plurality of first openings and at least one second opening, and growing columnar parts having a light emitting section from the plurality of first openings, and growing a structure from the second opening.

Method of manufacturing light emitting device, light emitting device, and projector

A light emitting device includes a substrate, and a laminated structure provided on the substrate, wherein the laminated structure has a plurality of columnar portions, the columnar portion contains a material having a wurtzite-type crystal structure, in a plan view as seen from a layered direction of the laminated structure, the plurality of columnar portions are arranged in a square lattice form or rectangular lattice form, a line passing through centers of the adjacent columnar portions is inclined relative to m-planes of the columnar portions located between the centers of the adjacent columnar portions, and vertices of the adjacent columnar portions are not placed on the line.

Light emitting device, method of manufacturing light emitting device, and projector

A liquid ejecting head includes a piezoelectric element having a first electrode on a vibration plate, a piezoelectric layer on the first electrode, and a second electrode on the piezoelectric material layer. The piezoelectric layer has functional portions sandwiched between the first and second electrodes; the second electrode configures a common electrode provided continuously across a plurality of the functional portions; the piezoelectric layer extends to an outer side of an end of the first electrode; the vibration plate has a first region opposing the first electrode, a second region opposing an area of the piezoelectric layer extending further toward an outer side than the first electrode, and a third region further toward the outer side than the piezoelectric layer; the second region has a thickness substantially equal to or greater than the thickness of the first region; and the third region is thinner than the first region.

Liquid ejecting head, liquid ejecting apparatus, and piezoelectric element

A piezoelectric device comprising a substrate having two surface sides; a vibration plate on one of the two surface side, a piezoelectric element including a first electrode provided on the vibration plate, a piezoelectric body layer provided on the first electrode, the piezoelectric body layer having a groove section on a side surface, the groove section including a first surface facing to the vibration plate, and a second electrode provided on the piezoelectric body layer, and a stress application film having tensile stress and provided on an inner surface of the groove section.

Piezoelectric device, liquid ejecting head, liquid ejecting apparatus and manufacturing method of piezoelectric device

A piezoelectric device includes: a substrate; a first electrode formed over the substrate; a first piezoelectric element formed over the first electrode; a low density region which is formed at a side of the first piezoelectric element and has density lower than that of the first piezoelectric element; a second piezoelectric element which is formed to cover the first piezoelectric element and the low density region; and a second electrode formed over the second piezoelectric element.

Piezoelectric device and method for manufacturing the same, piezoelectric actuator, liquid ejecting head, and liquid ejecting apparatus

A piezoelectric element includes a first electrode, a first multilayer composite disposed on the first electrode, a second multilayer composite disposed on the first electrode with a distance from the first multilayer composite, and a covering layer covering the side surfaces of the first and second multilayer composites and the surface of the first electrode between the first multilayer composite and the second multilayer composite. The first and second multilayer composites each include a piezoelectric layer and a second electrode over the piezoelectric layer. The first electrode contains a metal that can react with chlorine, and has at least one of a bump and a dip at the surface thereof between the first multilayer composite and the second multilayer composite.

Piezoelectric element, piezoelectric actuator, liquid ejecting head, and liquid ejecting apparatus

A piezoelectric element includes a first electrode, a second electrode, and a piezoelectric layer between the first electrode and the second electrode. The first electrode includes a first electroconductive layer having a first surface at the piezoelectric layer side and a second electroconductive layer having a second surface at the first surface side. The second electroconductive layer mainly contains lanthanum nickelate and is disposed on the first surface. The first electrode, the piezoelectric layer and the second electrode overlap with each other when viewed in the direction of the normal to the first surface to form an overlap portion acting as a driving portion. At least part of the second electroconductive layer is disposed within the sides of the first surface within the driving portion, and the second surface has a smaller area than the first surface within the driving portion.

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Shiojiri, Japan

Hideki Hahiro