Edwards Japan Limited

Hideki Enosawa

Manabu Nonaka

Takashi Kabasawa

Yasushi Maejima

Tsutomu Takaada

A vacuum pump includes: a particle transferring portion that functions as a means for transferring a particle in an exhaust direction of the gas particle by increasing or reducing a height of an upstream end of at least a part of rotor blades among a plurality of rotor blades that constitute an uppermost exhaust stage to realize a stepped structure in which heights of the upstream ends differ as the uppermost exhaust stage as a whole, and in a rotating body constituted by the plurality of rotor blades, the particle transferring portion, and a cylindrical portion that supports the plurality of rotor blades, an imbalance created with respect to the rotating body as a whole by a presence of a rotor blade of which a height of the upstream end has become higher than other rotor blades due to the stepped structure has been corrected.

Vacuum pump

A deposited material sensor is arranged, in a flow path of a gas from an inlet port to an outlet port, on an upstream side or a downstream side of a predetermined flow path position where a cause of disruption to operation of the vacuum pump is to occur. In addition, the deposited material sensor detects a presence or absence of deposited material at the arrangement position of the deposited material sensor, and the arrangement position of the deposited material sensor is a position where a thickness of the deposited material at the predetermined flow path position assumes a predetermined thickness that corresponds to a maintenance time of maintenance for suppressing the cause when a detection state of the deposited material sensor changes from deposited material absent to deposited material present.

A vacuum pump includes a plurality of exhaust stages provided between an inlet port and an exhaust port so as to function as means for exhausting gas molecules, and a number of blades provided between the inlet port and an uppermost exhaust stage of the plurality of exhaust stages so as to rotate together with a rotary blade that constitutes the uppermost exhaust stage as a particle transport stage for transporting particles in an exhaust direction of the gas molecules, the number being smaller than the number of rotary blades that constitutes the uppermost exhaust stage.

Growing community of inventors

Chiba, Japan

Hideki Enosawa