Tokyo Electron Limited

Hidehito Yokomori

Shinji Iino

Satoshi Sano

Yoichi Nakagomi

Hiroto Koizumi

A monitor device for monitoring an object to be tested is provided in a test apparatus which includes a test section for testing the electrical characteristics of the object, a storage section for storing the object, and a transfer section for conveying the object between the storage section and the test section. This monitor device includes an imaging device used in alignment of the object in the test section, a sensor for sensing the position of the object in the transfer section, and a display panel for displaying an image of the interior of the test apparatus and displaying the alignment state in the test section and the position information of the object in the transfer section in the image of the test apparatus.

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Nirasaki, Japan

Hidehito Yokomori