Fujikin Inc.

Hidehiro Doya

Kazuhiro Fujine

Masaru Sato

Shinya Nojima

Takayuki Suzuki

Yusuke Shibata

A joint includes a first block, a second block, and a single pipe section connecting the first block and the second block. The first block, the second block, and the single pipe have a first gas passage and a second gas passage inside therein. The first gas passage is formed so that a first port which opens at an outer surface of the first block, the single pipe section, and a second port which opens at an outer surface of the second block communicate with each other. The second gas passage is formed so that a third port and a fourth port which open at the outer surface of the second block communicate with each other. The second port is disposed between the third port and the fourth port.

Joint and fluid control device

A fluid control system is provided which, without reducing the supply flow rate of a fluid, is considerably more miniaturized and integrated. This fluid control system includes base blocks and fluid devices respectively installed on upper surfaces of the base blocks. The base blocks each include protruding pipe parts protruding in a longitudinal direction. The protruding pipe parts each communicate with a corresponding second flow path. The protruding pipe part on a downstream side end surface of the base block and the protruding pipe part on an upstream side end surface of the base block are air-tightly or liquid-tightly connected to each other by a welding material.

Fluid control system and product manufacturing method using fluid control system

Provided is a fluid control system including upstream-side and downstream-side base blocks, each defining a flow path provided with flow path ports, including a screw hole and a screw hole formed between the two flow path ports in longitudinal directions, and coupling to the upstream-side and downstream-side base blocks and a body of a fluid device by tightening bolts. End portions of the upstream-side and downstream-side base blocks are coupled to each other by the tightening bolts.

Fluid control system, base block used for same, and method for manufacturing fluid control system

Provided is a fluid control apparatus in which a pipe heating member may be mounted or removed with flexibility (i.e., without affecting other components) while one line, composed of the plurality of fluid control devices arranged in series, as a unit may be added or modified readily. The apparatus includes: a plate-shaped support memberto which a plurality of passage blocksare detachably mounted; a hollow metal mounting memberhaving an upper surface to which the support memberis secured and being detachably mounted to a base member; and a pipe heating memberfitted into the mounting member. The pipe heating member, including a bottom walland a pair of side walls, accommodates a pipebetween the side wallsand is fitted into the mounting memberwith the pipe heating memberabutting the mounting member.

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Osaka, Japan

Hidehiro Doya