Anelva Corporation

Hidefumi Funaki

Takehiro Sakurai

Haruhiro Kobayashi

In a flexible magnetic recording medium comprising first and second films (11) and (12) successively formed on a substrate (10), the first film comprises an alloy of nickel and iron together with a magnetization adjusting component. An amount of the magnetization adjusting component is adjusted so that the first film has saturation magnetization less than or equal to 500 e.m.u./cc. The magnetization adjusting component may be either molybdenum or a combination of molybdenum and copper. The magnetization adjusting component may be between 12 and 50% by weight in the first film. Alternatively, the magnetization adjusting component may be titanium or silicon. The alloy may be Permalloy. The substrate may be a polyester film.

Flexible magnetic recording medium comprising an underlying film having

In a sputtering apparatus of the type wherein a cathode including a target made of ferromagnetic material and a substrate to be sputtered are disposed in an evacuated vessel in a spaced opposing relationship so as to sputter the target with ions to form thin magnetic films on said substrate, there are provided a magnet disposed on a backing plate, a shield covering surfaces of the magnet facing the substrate, the shield being made of the same or similar material as the target, and a metal block disposed to surround the magnet in contact with the shield and the backing plate. A passage for passing cooling water to cool the above components is further provided in the cathode.

Sputtering apparatus

For use in a magnetron-type sputtering device, a target assembly comprises a magnetic target plate and first and second permanent magnet pieces brought into contact with the target plate circumferentially and centrally of the target plate with differently named poles of the respective magnet pieces placed nearer to the target plate. The magnet pieces may be attached to that surface of the target plate which is directed to a hollow space of the sputtering device. Alternatively, the magnet pieces may be attached to inner and outer circumferential surfaces of the target plate, respectively. Preferably, the magnet pieces are covered with a shield cover of a conductor or the material of the target plate. A conductive body is placed in contact with the target plate on the side opposite to the above-mentioned surface to serve as an electrode. The conductive body is preferably made of a soft magnetic material.

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Hamura, Japan

Hidefumi Funaki