Ngk Insulators, Inc.

Hideaki Takasaki

Takashi Kataigi

A ceramic heater includes an AlN ceramic substrate having a wafer placement surface in which, from a position closer to the wafer placement surface, a plasma-generation RF electrode and a heater electrode are embedded in this order so as to be separated from each other. The AlN ceramic substrate includes an AlN ceramic high-resistivity layer disposed between the RF electrode and the heater electrode, and an AlN ceramic low-resistivity layer other than the high-resistivity layer. The high-resistivity layer and the low-resistivity layer each contain Si, Mg, and Ti. The high-resistivity layer has higher Mg and Ti contents and a higher volume resistivity than the low-resistivity layer.

Ceramic heater

A semiconductor manufacturing apparatus member in which an insulating electrostatic chuck having a wafer placement surface and provided with a narrow hole and a conductive cooling plate provided with a gas supply hole are bonded together, the member includes a plug chamber composed of at least one of an electrostatic chuck side recess and a cooling plate side recess, a porous insulating air permeable plug disposed in the plug chamber, an annular dense layer provided on the surface of the air permeable plug so as to separate the surface of the air permeable plug into a narrow hole side surface and a gas supply hole side surface and an adhesive layer filled between the dense layer and the wall surface of the plug chamber.

Semiconductor manufacturing apparatus member and method for manufacturing the same

A member for a semiconductor manufacturing apparatus includes an electrostatic chuck, a cooling unit, a spacer (an O-ring, an outer periphery spacer, or the like) for securing a gap placed between the electrostatic chuck and the cooling unit, and a clamp ring placed on the upper surface of the outer periphery of the electrostatic chuck. The clamp ring is fastened to the cooling unit with screws. The screws are inserted into coil springs that prevent loosening, and are fastened to nuts. The coil springs are attached not to the clamp ring side but to the cooling unit side.

Growing community of inventors

Handa, Japan

Hideaki Takasaki