Shibaura Mechatronics Corporation

Covalent Materials Corporation

Hideaki Takano

Yoshinori Hayashi

Koji Izunome

Takeshi Senda

Miyuki Shimizu

Kazuhiko Hamatani

An image pickup device disposed in a predetermined position relative to a surface of a strained silicon wafer photographs the surface of the strained silicon wafer in a plurality of rotation angle positions on photographing conditions under which bright lines appearing on the surface of the strained silicon wafer can be photographed, in an environment where a light source device illuminates the surface of the strained silicon wafer which is rotating. A composite image in a predetermined angle position is generated from surface images of the strained silicon wafer in a plurality of rotation angle positions obtained by the image pickup device.

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Shibata, Japan

Hideaki Takano