Kelk Ltd.

Nikon Corporation

Hideaki Ohkubo

Atsushi Kobayashi

Masato Horikoshi

Wataru Kiyosawa

Hiroyuki Matsushiro

Toru Suzuki

Toru Fujii

Masatoshi Suzuki

Kazuhiro Mimura

Tetsuji Onuki

Shunsuke Kushibiki

Tatsuro Ohtaki

A temperature control device includes: a top plate that supports a substrate; a base plate connected to the top plate so as to form an internal space with the top plate; a thermoelectric module plate arranged in the internal space; a heat exchange plate that is arranged in the internal space and exchanges heat with the thermoelectric module plate; and a sealing member that comes into contact with each of the top plate and the base plate.

Temperature control device

A temperature adjustment device includes: a pair of flow path plates, each of the pair of flow path plates including a flow path groove provided on a front surface of the each of the pair of flow path plates and at least a part of the front surface; a spacer member that includes a support surface projecting from the front surface, and connects the pair of flow path plates such that a back surface of one of the pair of flow path plates and a back surface of the other of the pair of flow path plate face each other; and a heat transfer plate that faces the flow path groove, and is supported by the support surface.

Temperature adjustment device with spacers

A temperature adjustment device includes a flow path plate that includes a flow path groove, a heat transfer plate that faces the flow path groove, and a thermoelectric module plate that is connected to the heat transfer plate. A surface roughness of the flow path plate is 0.20 μm or more and 0.25 μm or less.

Temperature adjustment device and method for manufacturing temperature adjustment device

A temperature control device includes: a top plate that supports a substrate; a base plate connected to the top plate so as to form an internal space with the top plate; a thermoelectric module plate arranged in the internal space; a heat exchange plate that is arranged in the internal space and exchanges heat with the thermoelectric module plate; a first coupling member that couples the top plate and the base plate via the thermoelectric module plate and the heat exchange plate and is fixed to each of the top plate and the base plate; and a second coupling member that couples the top plate and the base plate via the thermoelectric module plate and the heat exchange plate, is fixed to the top plate, and is movable relative to the base plate.

To control the temperature of a fluid with high accuracy, a temperature control system is equipped with: a circulation channel including a temperature control target and a tank containing a fluid adjusted to a specified temperature range including a target temperature of the temperature control target; and a first temperature controller that is arranged between the tank and the temperature control target in the circulation channel and that adjusts the temperature of the fluid to be supplied to the temperature control target.

Temperature control system and temperature control method

A thermoelectric module of the invention includes: first and second thermoelectric elements; a first electrode having a plate-shaped body whose first surface is bonded to a first end surface of the first thermoelectric element and a first end surface of the second thermoelectric element; a second electrode bonded to a second end surface of the first thermoelectric element; and a third electrode bonded to a second end surface of the thermoelectric element. The first electrode includes: a first cutout formed at a first side in a width direction; and a second cutout formed at a second side in the width direction. In the width direction, at least one of the first cutout or the second cutout is present in a section between the first side and the second side of the first electrode.

Thermoelectric module

A high resolution scanning probe type microscope capable for simultaneous observation of the optical images of a sample and the probe tip. The microscope has a construction in which the probe and the optical microscope are supported with separate supporting members and the probe is disposed inside the visual field of the optical microscope. The supporting members of the probe and the optical microscope are installed on a vibration-proof table, and the supporting member for the probe has a double-end-supported type beam construction.

Scanning probe type microscope apparatus

A composite scanning tunneling microscope comprises a first objective optical system for collimating an optical flux from a sample, a second objective optical system for condensing the optical flux thus collimated, and a transparent member disposed between the first and the second objective optical systems. A through hole is perforated along an optical axis in the center of the first objective optical system. A tube scanner member has a probe for detecting a tunnel current disposed at one end thereof. The tube scanner member passes through the hole of the first objective optical system without a contact therewith. The other end of the tube scanner member is fixed to the transparent member. The tube scanner member fixed to the transparent member is separate from and independent of an optical microscope, so that a tunnel current may stably be detected without influences on the probe from vibrations of the optical microscope.

Growing community of inventors

Kanagawa, Japan

Hideaki Ohkubo