Fuji Electric Co., Ltd.

Hideaki Nishii

Makoto Toraguchi

Hisamichi Ishioka

Takaya Nishikawa

An ozone generator includes a vessel provided at one end with a feed gas chamber for receiving a feed gas through an inlet and at the other end with an ozonized gas chamber, communicating with an outlet, for receiving an ozonized gas, a cylindrical tube ground electrode having a dielectric on an inner peripheral surface for communicating the feed gas chamber with ozonized gas chamber, a hollow cylindrical high voltage electrode having a predetermined discharge gap with respect to the dielectric and disposed concentrically with the cylindrical tube ground electrode, and a high frequency power source for applying a voltage between the ground electrode and the high voltage electrode. Cooling water is supplied to a water jacket surrounding the ground electrode and formed within the vessel and to the hollow cylindrical high voltage electrode to cool both electrodes. The cylindrical tube ground electrode and the hollow cylindrical high voltage electrode define an ozone generating tube, and the ozone generator incorporates a plurality of the ozone generating tubes.

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Kawasaki, Japan

Hideaki Nishii