Seiko Epson Corporation

Hideaki Naono

Takashi Inoue

Tsutomu Asakawa

Takeyoshi Ushiki

Wataru Ito

Yasushi Takano

Takumi Seki

Yoshihiro Watanabe

Satoshi Taguchi

An organic electroluminescence apparatus includes a support substrate having a pixel region; a plurality of pixels; organic electroluminescence devices each having at least a first electrode layer, an emission layer, and a translucent second electrode layer; and an auxiliary wiring layer having a stripe-like pattern or a grid-like pattern. The apparatus emits light emitted from the organic electroluminescence device from the side where the second electrode layer is disposed, the second electrode layer is disposed over the entire or approximately the entire pixel region, and the auxiliary wiring layer is formed of a metal layer having a thickness capable of achieving translucency and is disposed so as to, in the plan view, overlap at least part of the organic electroluminescence device of each of the plurality of the pixels.

Organic electroluminescence apparatus with metal auxiliary wiring

The present invention provides a method of manufacturing a nonlinear element capable further improving nonlinearity of a nonlinear element, an electrooptic device, and electronic apparatus. In forming an element substrate of a liquid crystal device, an underlying layer is formed on the surface of the element substrate in the underlying layer forming step (a), and then a first metal film having a metal film containing at least Ta is formed in the first metal film forming step (b). Then, in the insulating film forming step (c), the first metal film is annealed under high pressure in an atmosphere containing water vapor to form an insulating film on the first metal film. Then, in the second metal film forming step, a second metal film is formed on the surface of the insulating film to produce a nonlinear element.

Method of manufacturing nonlinear element, method of manufacturing electrooptic device, electrooptic device, and electronic apparatus

The present invention provides a MIM type non-linear element in which the capacitance is sufficiently small and in which little changes over time are exhibited in the current-voltage characteristics, a liquid crystal display panel with high image quality using the MIM type non-linear element, and a method of manufacturing the MIM type non-linear element. The MIM type non-linear element includes a first conductive film, an insulation film and a second conductive film, which are laminated on a substrate. The insulation film has a relative dielectric constant of 25.5 or less, preferably 24.0-25.5. In elementary analysis by SIMS, a hydrogen spectrum of the boundary region between the first conductive film and the insulation film has a width of 10 nm or more in the depth direction at an intensity of one tenth of the peak intensity. The first conductive film of the MIM type non-linear element shows a peak temperature of 300&deg; C. or higher in a thermal desorption spectroscopy of hydrogen. The MIM type non-linear element is manufactured by, for example, a method containing the steps of (a) forming the first conductive film, (b) heat-treating the first conductive film at a temperature of 300&deg; C. or higher in an inert gas, (c) forming the insulation film on the surface of the first conductive film by anodization of the first conductive film, and (d) forming the second conductive film on the surface of the insulation film.

Two-terminal type non-linear element, manufacturing method and liquid crystal display panel

Two-terminal type non-linear element, manufacturing method thereof and liquid crystal display panel

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Suwa, Japan

Hideaki Naono