Mitsubishi Electric Corporation

Tekscend Photomask Corp.

Hideaki Nakano

Yosuke Fujimori

Kyoko Nomura

Hiroshi Nakashima

Nobuo Yamamoto

Syohei Abiko

Syuichi Iwata

Tsukasa Takagi

Takayuki Hanaki

Ayumi Goda

Masanori Tsujihara

Kenjiro Ichikawa

There are provided a reflective mask blank in which a fine absorption film pattern is formed even when a high-absorbent material is used as an absorption film of an EUV mask, whereby the shadowing effect can be reduced and electron beam repair etching can be performed and a reflective mask blank for producing the same. A reflective mask blank () according to this embodiment includes: a substrate (); a multi-layer reflective film () reflecting an EUV light having a multi-layer structure formed on the substrate (); a capping layer () protecting the multi-layer reflective film () formed on the multi-layer reflective film (); and an absorption film () absorbing the EUV light formed on the capping layer (), in which the absorption film () contains 50% by atom or more of elements constituting at least one of tin oxide (SnO) and indium oxide (InO) and contains a material easy to be etched by a fluorine-based gas or a chlorine-based gas.

Reflective mask blank and reflective mask

A manufacturing apparatus of a core material of a highly reliable vacuum heat insulating material having excellent workability, usability, and heat insulating performance is provided. The manufacturing apparatus of a core material of a vacuum heat insulating material related to the present invention includes: a reel for winding up a fiber assembly which has a predetermined width and is wound on a substantially cylindrical original fabric roll which has been cut to have a predetermined width, at a predetermined number of times; cutting means for cutting the fiber assembly which has been wound on the reel; and a forming member for forming the fiber assembly into a flat-plate-shaped core material after removing from the reel the fiber assembly which has been wound up on the reel at the predetermined number of times and been cut.

Manufacturing apparatus of core material of vacuum heat insulating material, manufacturing method of vacuum heat insulating material, vacuum heat insulating material, and refrigerator

A highly reliable vacuum heat insulating material having excellent workability, usability, and heat insulating performance, and a heat insulation box using the vacuum heat insulating material are provided. A vacuum heat insulating material includes: a first fiber assembly made by aligning a plurality of sheet-shaped fiber assemblies, which are continuous in a length direction, so as to be next to each other in a width direction; a second fiber assembly provided so as to overlap the first fiber assembly and made by aligning a plurality of sheet-shaped fiber assemblies, which are continuous in the length direction, so as to be next to each other in the width direction; and a core material formed in a flat plate shape by winding up the first fiber assembly and the second fiber assembly continuously from inside toward outside while being displaced by a predetermined amount Xb in the width direction.

Vacuum heat insulating material and refrigerator

There are provided a vacuum thermal insulating material that is excellent in terms of a handling property, a thermal insulating property, creep resistance, and productivity; and a thermal insulating box including the vacuum thermal insulating material. A core material was enclosed and sealed in a wrapping material with a gas barrier property. The core material of the vacuum thermal insulating material in which the interior of the wrapping material is in a decompression state, is constituted by one organic fibrous assembly having continuous organic fibers formed sheet-shaped or a stack of the organic fibrous assemblies.

Vacuum thermal insulating material and thermal insulating box including the same

In a vacuum thermal insulating material having a core material enclosed in a gas barrier container whose inside is made to be a decompressed state, the core material has a lamination structure in which a plurality of sheet-shaped long fiber organic fibrous assemblies are continuously wound up from an inner periphery to an outer periphery. Then, a plurality of sheet-shaped organic fibrous assemblies are arranged in parallel and sheet-shaped multiple organic fibrous assemblies having joint sections are formed. The joint sections are made not to overlap with the upper and lower of joint sections.

Growing community of inventors

Tokyo, Japan

Hideaki Nakano