Mitsubishi Rayon Company, Limited

Hideaki Kuwano

Tadayuki Fujiwara

Hikaru Momose

Yoshihiro Kamon

Atsushi Koizumi

Ryuichi Ansai

Atsushi Ootake

A (meth)acrylate represented by the following formula (1): 

(Meth)acrylate, raw material alcohol for the (meth)acrylate, method of producing the (meth)acrylate and the alcohol, polymer produced by polymerizing the (meth)acrylate, chemically amplified resist composition, and method of the formation of a pattern

A 5-methylene-1,3-dioxolan-4-one derivative and a monomer and copolymer thereof and a resist composition containing the polymer or copolymer where the 5-methylene-1,3 -dioxolan-4-one derivative is of formula (1): wherein Rrepresents a bridged cyclic hydrocarbon group containing 4 to 16 carbon atoms, or a linear or branched alkyl group containing 1 to 6 carbon atoms which has a bridged cyclic hydrocarbon group containing 4 to 16 carbon atoms as a substituent; Rrepresents a hydrogen atom, or a linear or branched alkyl group containing 1 to 6 carbon atoms; or Rand Rrepresent a bridged cyclic hydrocarbon group containing 4 to 16 carbon atoms together with the carbon atom to which they are bound, provided that the alkyl group and the bridged cyclic hydrocarbon group may have at least one substituent selected from a group consisting of a linear or branched alkyl group containing 1 to 6 carbon atoms which may be optionally substituted, a hydroxy group, a carboxy group, an acyl group containing 2 to 6 carbon atoms, an alkoxy group containing 1 to 6 carbon atoms, and a carboxy group esterified with an alcohol containing 1 to 6 carbon atoms.

5-methylene-1,3-dioxolan-4-one derivatives, process for their production, polymers of the derivatives, resist compositions, and pattern formation process

A (meth)acrylate represented by the following formula (): wherein each of R, R, Rand Rrepresents a hydrogen atom, a methyl group or an ethyl group; either one of Xor Xrepresents a (meth)acryloyloxy group and the other represents a hydrogen atom; both Aand Arepresent hydrogen atoms, or Aand Aform &#x2014;O&#x2014;, &#x2014;CH&#x2014; or &#x2014;CHCH&#x2014;, which can be produced by first producing a lactone by reducing an addition product obtained by the Diels-Alder reaction between-diene and maleic anhydride, and then hydrating the lactone to produce an alcohol followed by (meth)acrylation of the alcohol; a polymer produced by (co)polymerizing a monomer composition comprising the (meth)acrylate of the present invention is excellent in transparency, dry etching resistance, and solubility in organic solvents, and so it is preferably used as a resin for a chemically amplified resist composition.

(Meth)acrylate esters, starting alcohols for the preparation thereof, processes for preparing both, polymers of the esters, chemically amplifiable resist compositions, and method for forming patterns

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Kanagawa, Japan

Hideaki Kuwano