Tosoh Corporation

Tosoh Quartz Corporation

Tosoh Sgm Corporation

Hideaki Kiriya

Toru Futami

Akira Kawai

Keiichiro Nishizawa

Tomohiro Ohkawa

Katsuyuki Hara

Koji Kitayama

Hirotatsu Kusakabe

Kazuyoshi Arai

Yoshinori Harada

Tsutomu Takahata

Shinkichi Hashimoto

A fine channel device capable of producing fine particles in an industrial scale, hardening the fine particles immediately after the production and recovering the fine particles from a medium without collapsing the shape of the produced fine particles, a fine particle producing method using the fine channel device and a solvent extraction method using the fine channel, are presented. The fine channel device comprises a fine channel provided with an inlet port and an inlet channel which feed a dispersion phase, an inlet port and an inlet channel which feed a continuous phase, and an outlet channel and an outlet port which discharge fine particles produced by the dispersion phase and the continuous phase, wherein the inlet channel for feeding the dispersion phase and the inlet channel for feeding the continuous phase are joined at an arbitrary angle, and the two inlet channels are connected to the outlet channel at the arbitrary angle.

Fine channel device, fine particle producing method and solvent extraction method

Highly durable silica glass comprising silica having incorporated therein aluminum and at least one element (M) selected from group 2A elements, group 3A elements and group 4A elements of the periodic table. Preferably, the sum of aluminum and element (M) is at least 30 atomic % based on the amount of total metal elements in the silica glass, and the atomic ratio of aluminum to element (M) is in the range of 0.05 to 20. The silica glass has a high purity and exhibits enhanced durability while good processability and machinability, and reduced dusting property are kept, and the glass is suitable for members of a semiconductor production apparatus or liquid crystal display production apparatus using a halogenated gas and/or its plasma.

Highly durable silica glass, process for producing same, member comprised thereof, and apparatus provided therewith

Growing community of inventors

Kanagawa-ken, Japan

Hideaki Kiriya