Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Sumco Corporation (1 from 597 patents)
1 patent:
1. 10338005 - Apparatus for inspecting back surface of epitaxial wafer and method of inspecting back surface of epitaxial wafer using the same