Ulvac, Inc.

Hideaki Inoue

Shinnosuke Tokuhira

Shinichi Wada

Harukuni Furuse

Jirou Endo

Takuya Wade

Mikiya Suzuki

Toshio Suzuki

Kouji Shibayama

Kenji Hashimoto

Takaaki Terui

Koji Shibayama

Yasuhiro Kimura

Kenji Machiya

A gate valve comprising a plurality of first force-applying units built in a valve box; a second force-applying unit disposed between a first movable valve and a second movable valve; and a third force-applying unit. The first force-applying units are driven by incompressible fluid and have a function of applying a force to the first movable valve to be directed to the first opening portion in the flow passage direction and thereby causing the seal portion to be in close contact with a valve box inner surface located at the periphery of the first opening portion. The gate valve includes an incompressible-fluid driver that drives, the first force-applying units by incompressible fluid.

Gate valve

A vacuum pump according to an embodiment of the present invention includes a pump housing and a cooling pipe. The pump housing is constituted by cast iron. The cooling pipe includes an outer circumferential surface and an inner circumferential surface and is constituted by stainless steel. The cooling pipe passes through the pump housing and the outer circumferential surface which is in close contact with the pump housing, is constituted by a sensitized layer. This vacuum pump is formed such that the pump housing constituted by cast iron is casted around the cooling pipe constituted by stainless steel. The sensitized layer is provided on the outer circumferential surface of the cooling pipe, the sensitized layer is in contact with the pump housing, and the pump housing is efficiently cooled.

Vacuum pump

[Object] To efficiently supply lubricant oil to a bearing member with a simple mechanism. [Solving Means] A vacuum pump includes a first housing, a second housing, a rotor shaft, a lubricant oil-stirring plate, and a bearing member. The second housing is attached to the first housing and forms a space that stores lubricant oil together with the first housing. The rotor shaft passes through the first housing. The lubricant oil-stirring plate is housed in the space and is attached to the rotor shaft. The bearing member is fixed to the first housing and rotatably supports the rotor shaft. The first housing includes a supply port that enables lubricant oil to be supplied to the bearing member. The second housing includes an inner-wall upper portion which the lubricant oil stirred by the lubricant oil-stirring plate hits against. The inner-wall upper portion of the second housing includes a recess portion that enables the lubricant oil to move above the supply port.

Vacuum pump having a first housing with a supply port and a second housing with a recess portion

A gate valve of the invention includes a valve box, a neutral valve body, and a rotation shaft. The neutral valve body includes a neutral valve and a movable valve. The movable valve includes a first movable valve and a second movable valve. The gate valve includes a plurality of first force-applying units, a second force-applying unit, and a third force-applying unit. The third force-applying unit applies a force to the first movable valve. The first force-applying units apply a force to the first movable valve and thereby causing the seal portion to be in close contact with a valve box inner surface located at a periphery of the first opening portion. The second force-applying unit drives the first movable valve and the second movable valve so that thicknesses thereof in the flow passage direction are adjustable.

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Chigasaki, Japan

Hideaki Inoue