Nhk Spring Co., Ltd.

Hibiki Yokoyama

Jun Futakuchiya

Noriyoshi Kaneda

Naoya Kida

Michiyoshi Sone

A stage includes a base material including a step portion and an insulating film. The step portion includes a first surface recessed from a top surface of the base material and a second surface recessed from a side surface of the base material. The insulating film includes a plurality of first layers on the first surface and a plurality of second layers on the second surface. In the step portion, each first end portion of the plurality of first layers and each second end portion of the plurality of second layers are alternately stacked. The first surface and the second surface are connected via a corner, and each first end portion and each second end portion are alternately stacked at the corner.

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Yokohama, Japan

Hibiki Yokoyama