Carl Zeiss Smt Gmbh

Heyjin Chris Park

Ramani Pichumani

Anthony Morin

David Dryden

A micro-tooling device, such as, for example, a scanning electron microscope or a focused-ion beam microscope, provides images. A first machine-learning algorithm and a second machine-learning algorithm are sequentially coupled. The first machine-learning algorithm determines a progress along a predefined workflow based on feature recognition in images associated with the workflow. The second machine-learning algorithm predicts settings of operational parameters of the micro-tooling device in accordance with the progress along the predefined workflow.

Growing community of inventors

Pleasanton, CA, United States of America

Heyjin Chris Park