Fei Comapny

Heyang Li

Adrian Paul Sheppard

Andrew M Kingston

Shane Jamie Latham

Glenn Robert Myers

Benoit Recur

Trond Karsten Varslot

Shane Latham

Trond Varslot

Glenn Myers

Andrew Kingston

A method of investigating a specimen using a tomographic imaging apparatus comprising:

Acquisition and processing of data in a tomographic imaging apparatus

A method of investigating a specimen using a tomographic imaging apparatus using a stage for producing relative motion of a source with respect to a specimen, so as to allow the source and a detector to image the specimen along a series of different viewing axes and a processing apparatus for assembling a tomographic image of at least part of the specimen. The investigation is carried out by considering a virtual reference surface that surrounds the specimen and is substantially centered thereon, considering an incoming point of intersection of each of said viewing axes with this reference surface, thereby generating a set of such intersection points corresponding to the series of viewing axes, choosing discrete viewing axes in the series so as to cause the set to comprise a two-dimensional lattice of points located areally on the reference surface in a substantially uniform distribution.

A method of investigating a specimen using a tomographic imaging apparatus, by performing, in multiple iterations, the following steps:

Data processing in a tomographic imaging apparatus

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Harrison, Australia

Heyang Li