Samsung Display Co., Ltd.

Samsung Displayco., Ltd.

Heungyeol Na

Dongwon Seol

Mingyoun Kang

Minsoo Kim

Valeriy Prushinskiy

Jaemin Hong

Youngshin Pyo

Wonsik Hyun

A system for transferring a substrate includes a substrate transporter at which is captured a first image with which a position of the substrate at the substrate transporter is determined; a tray at which is captured a second image with which a position of each of a plurality of substrates relative to the tray is determined; a substrate mover with which the substrate is movable in a revolving manner between the substrate transporter and the tray, the substrate mover including: an arm portion movable in the revolving manner between the substrate transporter and the tray, and a substrate securing portion movable together with the arm portion; and an imager with which the first image and the second image are captured, the imager connected to the arm portion and movable in the revolving manner between the substrate transporter and the tray together with the arm portion.

System for transferring substrate and method for transferring substrate using the same

System for transferring substrate

A substrate treatment method performed by a substrate treatment device includes placing a substrate on a stage, treating the substrate placed on the stage; and detaching a treated substrate from a stage. Detaching the treated substrate includes pushing the substrate with a lift pin in a direction away from the stage, and ejecting fluid through a fluid ejection unit onto the substrate in a direction away from the stage.

Substrate treatment device providing improved detachment mechanism between substrate and stage and substrate treatment method performed using the same

A method of manufacturing a mask may include forming initial ribs and removing edge portions of the initial ribs to form final ribs, each of which has a top width smaller than that of the initial rib. A space between the initial ribs may be smaller than a width of a slit limited by the final ribs.

Method of manufacturing a mask

Growing community of inventors

Yongin-si, South Korea

Heungyeol Na