Samsung Electronics Co., Ltd.

Seoul National University

Heui-Sik Jeon

Jung-Hee Kim

Sungzoon Cho

Young-Hak Lee

Eunjeong Lucy Park

Jiwon Yang

Hae-Sang Park

Jooseoung Park

An apparatus and method of segmenting sensor data are provided. The apparatus includes a sensor, a first segmentation unit, a continuity evaluation unit, a second segmentation unit, and a segmentation determination unit. The sensor collects sensor data for a process of the semiconductor manufacturing facility. The first segmentation unit extracts a variation point of the sensor data to perform an abnormal difference (AD) segmentation on the sensor data based on the at least one variation point. The continuity evaluation unit evaluates a continuity ratio of the sensor data. The second segmentation unit performs a free-knot spline (FS) segmentation on the sensor data when the continuity ratio exceeds a reference ratio. The segmentation determination unit compares the AD segmentation result with the FS segmentation result and to select one of the results on the comparison result.

Apparatus and method of segmenting sensor data output from a semiconductor manufacturing facility

Growing community of inventors

Suwon-si, South Korea

Heui-Sik Jeon