American Air Liquide, Inc.

L'air Liquide, Societe Anonyme a Directoire Et Conseil De Surveillance Pour L'etude Et L'exploitation Des Procedes Georges Claude

Air Liquide America, L.p.

Herve E Dulphy

Mindi Xu

Hwa-Chi Wang

Joseph E Paganessi

Gregory M Jursich

Naoyuki Nakamoto

Guillaume Rameau

Lorrin Honda

Tay Sayasane

Yukinobu Nishikawa

Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical to a point of use or to another integral block are provided. More particularly, the integral blocks include a recharge container block, a pressurization gas block, a purge gas block, a waste recovery block, a vacuum block, a solvent supply block, a degas block, a control block, and a filtration block. Various integral blocks may be selected to form a chemical delivery system, which is particularly suited for a given application. A chemical delivery system will typically comprise a chemical container block, a chemical delivery block, and a point of use in line with the chemical container block and chemical delivery block, as well as one or more integral blocks. The invention also relates to a method for delivering an ultrapure chemical from a chemical container to a point of use, by connecting a chemical container block, containing an ultrapure chemical, to a chemical delivery block and introducing the ultrapure chemical to a point of use. The methods may also include the use of one or more integral blocks. The chemical delivery systems and methods of the invention may be used in a variety of applications. In particular, the invention may be used in electronics fabrication, optical fiber manufacture or semiconductor manufacture.

Integral blocks, chemical delivery systems and methods for delivering an ultrapure chemical

Apparatus and processes are presented to contact a dry, preferably high purity inert gas with a chemical composition in a pressure vessel, or a wetting composition, to form a wet inert gas, which is then used to pressurize the chemical composition out of the pressure vessel. No additional space is needed for an external humidifier. Since a very small amount of vapor is needed to form a wet inert gas, the composition of chemical composition will not be significantly affected.

Pressure vessel systems and methods for dispensing liquid chemical compositions

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Marseilles, France

Herve E Dulphy