Omniprobe, Inc.

Herschel M Marchman

Thomas M Moore

Gonzalo Amador

Rocky Kruger

A multiple magnification optical system has a single objective focused upon a specimen at a given working distance. A graded-index lens receives light passing through the objective from the specimen. A beam splitter splits the light exiting the gradient-index lens into a first optical axis and a second optical axis. A first lens is aligned in the first optical axis between the beam splitter and a first camera to focus a magnified image at the first camera. A second camera is situated along the second optical axis from the rear principal plane of the objective so as to obtain unity magnification when the working distance of the objective is set at twice its focal length. Multiple magnifications can be obtained with a single objective by moving the optical system axially to set different working distances from a specimen, and by using multiple beam splitters, or combinations thereof.

Multiple magnification optical system with single objective lens

A single-channel optical processing system for an energetic-beam instrument has separate sources for processing radiation and illumination radiation. The processing radiation and the illumination radiation are combined in a single optical path and directed to a sample surface inside the energetic-beam instrument through a self-focusing rod lens. The self-focusing rod lens thus has a working distance from the sample surface that will not interfere with typical arrangements of ion beams and electron beams in such instruments. A combination of polarizers and beam splitters allows separation of the combined incident radiation and the combined radiation reflected from the sample surface and returned through the same optical channel, so that the reflected radiation may be directed to an optical detector, such as a camera or spectrometer. In other embodiments, additional illumination of the sample surface is provided at an angle to the central axis of the self-focusing rod lens.

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Dallas, TX, United States of America

Herschel M Marchman