Olin Corporation

Herman J Boeglin

Michael J McGeary

Dirk Goossens

A process of forming chlorine-doped silicon dioxide films on a silicon substrate comprising oxidizing said silicon substrate in the presence of a chlorine source, thereby forming said chlorine-doped silicon dioxide film on said silicon substrate, said chlorine source being oxalyl chloride.

Use of oxalyl chloride to form chloride-doped silicon dioxide films of

Liquid chemical supply ampules, commonly called 'bubblers', which are used in semiconductor and fiber optic component production lines are automatically refilled without the need to interrupt operation of the production lines. The bubbler ampules utilize a supply of the liquid chemicals from which the ampules produce a gas stream which is saturated with the chemicals. An individual ampule will be connected by means of a selectively operable series of transfer valves to two separate chemical bulk supply tanks. The bulk supply tanks can include one fixed and one replaceable tank; or two replaceable tanks. A chemical supply system is operated by a microprocessor controller which is programmed to be able to selectively manipulate the transfer valves so as to supply the bubbler ampule with chemicals from the fixed bulk tank, and to refill the fixed tank with chemicals from the replaceable tank; or alternatively, the controller can manipulate the transfer valves so as to supply chemicals to the bubbler ampule, first from one replaceable tank, and then from the other replaceable tank. The system is thus able to operate production lines which use either one fixed bulk chemical supply tank and one replaceable bulk chemical supply tank; or two replaceable bulk chemical supply tanks.

Computer-controlled chemical dispensing with alternative operating modes

A plasma CVD process for forming silicon carbide-type films onto a substrate comprising the steps of:

Chemical vapor deposition (CVD) process for plasma depositing silicon

A thermal CVD process for forming silicon carbide-type films onto a substrate comprising the steps of:

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Waterbury, CT, United States of America

Herman J Boeglin