Fraunhofer-gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Miopas Gmbh

Herbert Venghaus

Helmut Heidrich

Peter Lützow

Thomas Wegner

Wolfgang Schlaak

Peter Lútzow

Hugo Joseph Wilhelmus Maria Hoekstra

The invention relates to a gas sensor having a mechanical microresonator, which has an excitation apparatus for optically exciting a mechanical oscillation of the microresonator as well as a reading apparatus for detecting the oscillation of the microresonator, wherein the reading apparatus comprises a waveguide which is implemented together with the microresonator on a dielectric or semiconducting substrate and is intended to optically read the oscillation of the microresonator, and wherein the excitation apparatus has an optical waveguide which is implemented on the same substrate and optically connects an excitation light source to the immediate surroundings of the microresonator. The invention also relates to a use of such a sensor to analyse a gas composition.

Photoacoustic gas sensor and its use

The invention relates to an optical sensor comprising an optical waveguide () and a light-sensitive element () for detecting light coupled out of the waveguide () and also various ring resonators (), the ring resonators () being coupled optically to the mentioned waveguide () and, with the exception of at most one of the ring resonators (), each having a means () for adjusting resonance frequencies of the respective ring resonator () and/or of the coupling between the ring resonator () and the waveguide () and at least two of the ring resonators () having different optical lengths in an initial state and being disposed for having their resonance frequencies influenced by means of different variables to be measured which are specific for each of these ring resonators (). The invention refers furthermore to a method which can be implemented with a sensor of this type for detecting molecules of at least one substance.

Optical sensor and method for detecting molecules

An optical sensor for detecting a substance includes a first waveguide and a second waveguide optically coupled via a directional coupler to the first waveguide. The sensor has a functional surface in a region of the directional coupler for accumulating or storing the substance to be detected so that an intensity of a coupling arranged by the directional coupler between the first waveguide and the second waveguide can be changed by the accumulating or storing of this substance. The first waveguide extends in a freely floating manner over a coupling path covered by the directional coupler or rests on a swellable material. The first waveguide is guided in a vicinity of the coupling path so that a spacing between the first waveguide and the second waveguide can be changed there by a deformation or movement of the first waveguide or of a carrier of the first waveguide.

Optical sensor

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Berlin, Germany

Herbert Venghaus