Average Co-Inventor Count = 3.00
ph-index = 1
The patent ph-index is calculated by counting the number of publications for which an author has been cited by other authors at least that same number of times.
Company Filing History:
1. Steag Rtp Systems Gmbh (1 from 31 patents)
1 patent:
1. 6051512 - Apparatus and method for rapid thermal processing (RTP) of a plurality