Dr. Johannes Heidenhain Gmbh

Johannas Heidenham Gmbh

Herbert Huber-Lenk

Wolfgang Holzapfel

Jörg Drescher

Mathias Hausschmid

Johann Streitwieser

Herbert Reiter

Erwin Spanner

An interferometric distance-measurement device includes a multi-wavelength light source which provides a beam having at least three different wavelengths. An interferometer unit splits the beam into measuring and reference beams. The measuring beam propagates in the direction of a measuring reflector movable along a measuring axis and undergoes a back-reflection, and the reference beam propagates in the direction of a stationary reference reflector and undergoes a back-reflection. The back-reflected measuring and reference beams interfere with each other in an interference beam. A detection unit splits the interference beam such that several phase-shifted partial interference signals result for each wavelength. A signal processing unit determines absolute position information regarding the measuring reflector from the partial interference signals of different wavelengths and an additional coarse position signal.

Device for interferometric distance measurement

An optical assembly of an interferometer that includes a beam splitter for dividing the beams emitted by a radiation source into at least one measuring and one reference beam and at least one measuring and one reference mirror, on which the measuring and the reference beams impinge, wherein at least one of the mirrors can be displaced along a measuring axis. The optical assembly further includes a beam deflector, as well as a retro-reflector, wherein the measuring and the reference beams reflected at the measuring and the reference mirrors via the beam deflector and the retro-reflector are guided at least a second time in the direction toward the measuring and the reference mirrors and wherein the beam deflector is embodied as a plane-parallel plate.

Optics system for an interferometer that uses a measuring mirror, a reference mirror and a beam deflector

A method for position determination that includes generating first and second position-dependent scanning signals, transmitting the first and second position-dependent scanning signals from a scanning location via corresponding first and second scanning channels to corresponding first and second storage elements, storing corresponding first and second instantaneous values present at the first and second storage elements at corresponding first and second storage times. Forming a measured position value from the first stored instantaneous value and the second stored instantaneous value. A difference exists between corresponding first and second transit times of the first and second position-dependent scanning signals in the corresponding first and second scanning channels, the difference is compensated by individually delaying the first and second position-dependent scanning signals, so that the stored first and second instantaneous values have appeared at a common time at the scanning location.

Method for determining a position and position measurement device for carrying out the method

A position measuring system that includes a scale and a scanning device that scans the scale. A light source, which emits a light pulse upon receipt of a request signal and an optical fiber that transmits the light pulse from the light source to the scanning device and for illuminating the scale. At least one photo detector that detects the light pulse affected by the scale as a function of its position.

Method for measuring position and position measuring device for carrying out said method

A method for position determination in a position measuring device that includes digitizing analog position data from a detector unit within time intervals of an internal clock rate and calculating position data from the digitized data. Determining a period of time &#x394;t between a pulse of the internal clock until an appearance of an external trigger signal and a processing of at least two position data, together with the period of time &#x394;t.

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Nussdorf/Sondermoning, Germany

Herbert Huber-Lenk