Tegal Corporation

Motorola Corporation

Commsoft, Inc.

Herbert G Drake, Jr

Roger B Lachenbruch

David J Drage

Ninko T Mirkovich

Thomas M Rathmann

Jerris H Peavey

Howard L Nurse

One of several processes is performed for the automatic management of footnote references in printed documents and a computer-controlled display shows bibliographically correct information in long form and short form in a processing system that provides for information to be enterd, stored, analyzed, merged, and transmitted to a printing device for the creation of a printed report that contains footnotes, endnotes or embedded notes which reference a source of information in correctly-reported style.

Method and means for managing citations in documents

A capacitive feed is disclosed for the lower electrode in a parallel plate plasma reactor. One plate of the capacitor comprises the lower electrode or a contact to the lower electrode. The other plate of the capacitor comprises an annular member insulated from the lower electrode, or the contact. There are no RF connections directly to the lower electrode.

Capacitive feed for plasma reactor

An improved pin lift mechanism for plasma processing of semiconductor wafers is disclosed in which the pins are each contained in a non-magnetic tube which is sealed to the wafer chuck. A magnetic slug in each tube couples external motion of a magnet to the pin.

Magnetically coupled wafer lift pins

An improved optical endpoint detector is disclosed in which two photocells are used in conjunction with analog multipliers and variable voltage sources, all under microprocessor control. The combination enables one to measure the ratio of intensity of different emission lines, as well as their individual outputs and alternative process monitoring signals.

Optical process for determining the endpoint of a process via analog

Wafer transport in the vacuum portion of an automated wafer processing machine is accomplished by means of an improved transport mechanism. The primary transport device is a rail guided, magnetically driven shuttle plate. Baffles serve to isolate the particle producing portions of the mechanism from the wafers. The major drive components are located inside the rails and outside the vacuum containment system. A pin lift apparatus located on the reactor chucks serves to remove and replace wafers on the shuttle plate. The disclosed apparatus provides efficient and reliable wafer transport with a minimum amount of particulate generation and is easily reconfigurable to single or multiple head machines.

Growing community of inventors

San Rafael, CA, United States of America

Herbert G Drake, Jr