Western Electric Company, Inc.

Herbert A Lord

Randy G Schneider

A planar electrode (17) having a plurality of concentric channels (34-34) therein through which coolant fluid passes to cool the electrode during a plasma etching process. The coolant is directed through at least two of the adjacent channels in opposite directions with the inputs (31) and outputs (32) located in close spaced relation to one another to provide a substantially uniform temperature on the surface of the electrode proximate thereto.

Uniformly cooled plasma etching electrode

Methods and apparatuses are disclosed for extruding tubular jackets of uniform radial thicknesses about cables employing a diverter tube assembly 10 that provides a divergent flow path for a plastic fluid from diametrically opposite channel orifices 46 to a tubular confluence. The diverter tube circumference is between 22 and 50 times the prespread width of each channel orifice while the axial to lateral spread ratio of the divergent flow path is between 1:2 tangent 30.degree. and 1:2 tangent 40.degree..

Method and apparatus for extruding tubular jackets

A planar electrode (17) having a plurality of concentric channels (34--34) therein through which coolant fluid passes to cool the electrode during a plasma etching process. The coolant is directed through at least two of the adjacent channels in opposite directions with the inputs (31) and outputs (32) located in close spaced relation to one another to provide a substantially uniform temperature on the surface of the electrode proximate thereto.

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East Windsor, NJ, United States of America

Herbert A Lord