Korea Institute of Science and Technology

Heon-Jin Choi

Jae-hwan Park

Jae-Gwan Park

Jae-Chul Pyun

An apparatus for fabricating ZnO nanostructures includes a heating element, a horizontal reaction tube having an inlet and an outlet. The reaction tube is positioned inside the interior cavity of the heating element with the inlet disposed to introduce a carrier gas into the reaction tube. The apparatus includes a source of a carrier gas in flow communication with the inlet, a container within the reaction tube that is disposed to receive and contain source materials comprising ZnO and graphite. An array of solid substrates is located on the container above the source materials. Adjacent substrates in the array are positioned with a space in between to allow the carrier gas to impinge on the source materials in the container.

Apparatus for synthesis of ZnO nano-structured materials

Disclosed are a method of fabricating ZnO nanostructures and its apparatus, and more particularly, to a method of fabricating ZnO nanostructures from Zn gas, which is produced by a reduction process between ZnO powder and graphite, on a silicon substrate, wherein various types of nanostructures are reproducibly generated by adjusting the processing temperature and the mixed ratio between oxygen and argon gases, which are introduced into the interior of a reaction tube as carrier gases, and its apparatus.

Growing community of inventors

Seoul, South Korea

Heon-Jin Choi