Umax Data Systems, Inc.

Taiwan Semiconductor Manufacturing Comp. Ltd.

Henry Peng

Li-Hsin Chu

Po-Feng Tsai

Chun-Jung Huang

Yung-Lin Hsu

Kuang Huan Hsu

Tsung Wei Chen

Kevin Yang

Wen-Tso Tseng

Hocking Chen

Ming-Tsan Lin

The present disclosure describes a system and a method for an ion implantation (IMP) process. The system includes an ion implanter configured to scan an ion beam over a target for a range of angles, a tilting mechanism configured to support and tilt the target, an ion-collecting device configured to collect a distribution and a number of ejected ions from the ion beam scan over the target, and a control unit configured to adjust a tilt angle based on a correction angle determined based on the distribution and number of ejected ions.

Method for an ion implantation process employing an ion-collecting device that collects a distribution of ejected ions from a target to correct a tilt angle of the target

Method for ion implantation that adjusts a targets tilt angle based on a distribution of ejected ions from a target

The present disclosure describes a system and a method for a ion implantation (IMP) process. The system includes an ion implanter configured to scan an ion beam over a target for a range of angles, a tilting mechanism configured to support and tilt the target, an ion-collecting device configured to collect a distribution and a number of ejected ions from the ion beam scan over the target, and a control unit configured to adjust a tilt angle based on a correction angle determined based on the distribution and number of ejected ions.

Method for ion implantation that adjusts a target's tilt angle based on a distribution of ejected ions from a target

A document moving transmission system for an optical scanner to drive the window assembly of a document moving optical scanner is disclosed. The transmission system consists several mechanism to account for providing the driving force, converting rotation into linear motion, performing the sliding motion with the window assembly, adjusting and maintaining flatness of the window assembly over the light transmitting slot inside the optical scanner housing.

Document moving transmission system for an optical scanner

The present invention discloses an optical system with multiple optical lens having capability of auto-focus calibration, instead of conventional scheme of manual operations. Furthermore, achieve purpose of obtaining more accuracy in sharpness and magnification calibration than the conventionally scheme, and of upgrading yield rate of the system. The optical system disclosed by the invention basically includes a lot of home-sensors and micro-sensors, lots of lens, an image sensor, an imaging control motor, a lens switch motor for switching the lens, and a base control motor for switching base of the optical system. By using the imaging control motor and the base control motor to control motions of the imaging device and the lens, auto sharpness and magnification calibration is easily achieved.

Multiple optical lens system with auto-focus calibration

An improvement of transparent window glass holding structure for an optical scanner includes a first rack fixedly disposed in the case. The first rack has a plural number of clamps for holding and gripping the transparent window glass securely without gluing the originals table to the case as does a conventional scanner. The originals table can be easily installed and removed to facilitate the repairs and maintenance of the scanner.

Transparent window glass holding structure for optical scanner

A lens switching apparatus for a dual-lens optical scanner includes a base, a plurality of magnetic elements, a plurality of electromagnetic elements, a guiding assembly and a slide block. Two optical lens with different magnification are mounted on the slide block. The slide block may be moved and positioned in one direction when one of the electromagnetic element attracting one adjacent magnetic element while another electromagnetic element repulsive another adjacent magnetic element. The dual-lens mounted on the slide block thus can be switched as desired for scanning process.

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Hsinchu, Taiwan

Henry Peng