Bruker Nano Gmbh

Henry Mittel

Chanmin Su

Stephen C Minne

Shuiqing Hu

Yan Hu

Ji Ma

Lin Huang

Weijie Wang

Anthonius Ruiter

Jianli He

Chunzeng Li

Anthonius G Ruiter

An apparatus and method of collecting topography, mechanical property data and electrical property data with an atomic force microscope (AFM) in either a single pass or a dual pass operation. PFT mode is preferably employed thus allowing the use of a wide range of probes, one benefit of which is to enhance the sensitivity of electrical property measurement.

Method and apparatus of electrical property measurement using an AFM operating in peak force tapping mode

A scanning probe microscope, such as an atomic force microscope, and method including z-stage and a bridge structure. A scanner containing a probe is mounted to the z-stage, which is movable in the z-axis to raise and lower the probe. The method reduces thermal drift of the z-stage and the bridge using a combination of heating elements thermally coupled to the z-stage and the bridge, ambient temperature sensors, and a controller to actively control the heating elements to maintain the bridge and the z-stage at an elevated temperature. Ideally, the temperatures in the system are selected so as to reduce drift between the probe and the sample during AFM scanning, wherein the drift is preferably maintained at less than about 1 nm for an ambient temperature change of about 1&#xb0; C.

Low drift scanning probe microscope

A scanning probe microscope, such as an atomic force microscope, include a z-stage and a bridge structure comprised substantially free of Invar. A scanner containing a probe is mounted to the z-stage, which is movable in the z-axis to raise and lower the probe. A drift compensation system is provided to reduce thermal drift of the z-stage and the bridge. The drift compensation system includes heating elements thermally coupled to the z-stage and the bridge, ambient temperature sensors, and a controller to actively control the heating elements to maintain the bridge and the z-stage at an elevated temperature.

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San Ramon, CA, United States of America

Henry Mittel