Fraunhofer-Gesellschaft Zur Foerderung Der Angewandten Forschung E.v.

Henry Leistner

Martin Richter

Martin Wackerle

Sebastian Kibler

Juergen Kruckow

Yuecel Congar

Robert Wieland

Lorenz Grünerbel

Agnes Bußmann

An embodiment is an electrostatic micro-pump including a diaphragm arrangement including a diaphragm and a first electrode structure. The electrostatic micro-pump further includes a valve arrangement, including an inlet check valve and an outlet check valve, wherein the diaphragm arrangement and the valve arrangement at least partially enclose a pump chamber. The electrostatic micro-pump further includes a second electrode structure arranged so as to form an electrostatic drive with the first electrode structure. The electrostatic drive is configured to deflect the diaphragm. The electrostatic micro-pump further includes at least one anti-stiction bump arranged between the first electrode structure and the second electrode structure, wherein in an inactive state of the micro-pump, a spacing between the first electrode structure and the second electrode structure varies towards a center region of the pump chamber when starting from a peripheral region of the pump chamber, wherein the peripheral region encloses the center region.

Electrostatic micro-pump and a process to produce an electrostatic micro-pump

A method for manufacturing at least one micromechanical device includes: Further embodiments relate to a valve manufactured by means of the method and to a micromechanical pump.

Method for manufacturing a micromechanical device and micromechanical valve

According to an embodiment, a sensor arrangement comprises a first micropump, e.g. a microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, a second micropump, e.g. microfluidic or peristaltic pump, having a normally closed (NC) safety valve, e.g. at the micropump output, and a sensor having a sensor chamber, e.g. a sensor cavity or sensor volume, with a sensor element, e.g. an active sensitive region or layer, in the sensor chamber, wherein the sensor is configured to provide a sensor output signal based on a condition of the fluid, e.g. a gas or liquid, in the sensor chamber. The sensor chamber of the sensor is fluidically coupled between the first and second micropump, and the first and second micropump are configured to provide a defined operation mode of the sensor arrangement based on the respective activation or operation condition of the first and second micropump for providing (1.) a defined negative fluid pressure in the sensor chamber, (2.) a defined positive fluid pressure in the sensor chamber or (3.) a defined fluid flow, e.g. fluid throughput, through the sensor chamber.

Sensor arrangement and method for sensing an amount or a concentration of a target fluid in a medium with the sensor arrangement

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Munich, Germany

Henry Leistner