Taiwan Semiconductor Manufacturing Comp. Ltd.

Umci Ltd

Henry Huang

Lee-Chung Lu

Shang-Chih Hsieh

Chi-Lin Liu

Ji-Yung Lin

Meng-Hsueh Wang

YongSeng Tan

A compressor circuit includes a plurality of inputs, a sum output, and a plurality of XOR circuits. Each XOR circuit of the plurality of XOR circuits includes first, second and third inputs, and a first output. The XOR circuit is configured to generate a logic value A&#x2295;B&#x2295;C at the first output, where A, B and C are logic values at the corresponding first, second and third inputs, and '&#x2295;' is the XOR logic operation. The plurality of XOR circuits includes first and second XOR circuits. The first, second and third inputs of the first XOR circuit are coupled to corresponding inputs among the plurality of inputs of the compressor circuit. The first output of the first XOR circuit is coupled to the first input of the second XOR circuit. The first output of the second XOR circuit is coupled to the sum output.

Compressor circuit and compressor circuit layout

An inspecting method comprises the following steps. A plurality of defect inspection devices is formed on a wafer. Each defect inspection device comprises an insulating layer and a conductive layer stacked over the insulating layer. A defect inspection parameter is set and the wafer is scanned with an electron beam to obtain a plurality of defect signals. The number of defect signals is checked to determine if it is equal to the number of defect inspection devices. If the number of defect signals is smaller than the number of defect inspection devices, the defect inspection parameter is readjusted and the aforementioned step of performing an electron beam scanning and checking for equality between the number of defect signals and the number of defect inspection devices are repeated. The process is complete when the number of defect signals is at least equal to the number of defect inspection devices.

Inspecting method of a defect inspection device

Growing community of inventors

Hsinchu, Taiwan

Henry Huang