Commissariat a L'energie Atomique

Commissariat &#xc0; L'&#xc9;nergie Atomique Et Aux &#xc9;nergies Alternatives

Henri Blanc

Gerard Barrois

Marcel Dominiak

Andre Baldy

Christian Pisella

The invention pertains to a method for exciting a resonant element of a microstructure, this element being mobile according to one degree of freedom. The method comprises a step for applying a charged particle beam to said microstructure, the beam being configured so as to drive the element in an alternating motion depending on its degree of freedom.

Method for exciting a mobile element of a microstructure

The invention relates to a process of assembly of at least two silicon substrates. The method comprises: The invention is applied to the sealing of cavities and of mechanical or electrical joints situated at the interface of two silicon substrates.

Method of assembling elements by localized heating

A polishing machine having a taut microabrasive sheet. The machine includes a machine polishing disk in the form of a planar reference disk and a microabrasive sheet held taut on the disk by an appropriate mechanism. The mechanism for holding the microabrasive sheet taut can be a delivery roll and a receiving roll. The machine can be applied to the polishing of silicon wafers containing integrated components and in particular magnetic read-write heads.

Polishing machine having a taut microabrasive strip and an improved

Polishing machine with an improved sample holding table in which the table has a cardan system with two first shafts having a first common longitudinal axis and two second shafts having a second common longitudinal axis. The shaft axes being in a polishing plane and intersecting in the center of the sample face to be polished. The machine can be applied to the production of magnetic read-write heads.

Polishing machine with an improved sample holding table

The spring for a slider comprises a flexible leaf (30) under compression, a pliable strip (40) under compression and a tongue (48), to which a slider (50) is secured.

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Saint Julien de Ratz, France

Henri Blanc