Intermolecular, Inc.

Heng Kai Hsu

Minh Le

Sandeep Nijhawan

Tong Ju

Jianhua Hu

Teresa B Sapirman

Transparent ohmic contacts to p-GaN and other high-work-function (&#x2267;4.2 eV) semiconductors are fabricated from zinc stannate (e.g., ZnSnO). ZnO and SnOmay be sputtered from separate targets and annealed to form the zinc stannate. The Zn:Sn ratio may be tuned over the range between 1:2 and 2:1 to optimize bandgap, work function, conductivity, and transparency for the particular semiconductor and wavelength of interest. Conductivity may be improved by crystallizing the zinc stannate, by doping with up to 5 wt % Al or In, or both.

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Hisnchu, Taiwan

Heng Kai Hsu