Inficon Gmbh

Hendrik Van Triest

Daniel Wetzig

Silvio Decker

Michael Dauenhauer

Maximilian Reismann

Josef Grenz

A vacuum leak detection system may comprise a test chamber unit having a test chamber gas inlet and a test chamber gas outlet, a gas detection unit having a gas detection gas inlet and a gas detection gas outlet, and a gas control unit connecting the test chamber gas inlet and the test chamber gas outlet to the gas detection gas inlet and the gas detection gas outlet, which is connected to the test chamber unit and to the gas detection unit, and which has separate gas line paths for optionally connecting the gas inlets and the gas outlets of the test chamber unit and the gas detection unit, wherein the gas control unit has a third gas inlet which is open towards the atmosphere and which can be connected to the test chamber gas inlet via a gas line path running through the gas control unit.

Vacuum leak detection system, gas control unit and method for gas leak detection

The invention relates to a film chamber for receiving a test object to be tested for the presence of a leak, including at least two film layers and at least two frame elements, each of which has a sealing surface so that the two frame elements lie against each other in a gas-tight manner in order to hermetically seal the film chamber. Each of the two film layers has at least one retaining profile in a wall region, and each of the two frame elements has at least one retaining groove in the frame element sealing surface in order to receive a retaining profile such that the two film layers are held between the two frame elements substantially by a formfitting connection.

Film chamber with retaining profile

An evacuable flexible test chamber () for a leakage test of a test piece, having a wall () surrounding a test chamber volume (), is characterized in that at least a portion of said wall is made up of two layers () of wall material of which at least the layer () facing said test chamber volume () is made from a flexible material, and that between said two layers () an overpressure as compared to the atmosphere surrounding said test chamber () is adapted to be created.

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Cologne, Germany

Hendrik Van Triest