Fei Comapny

University of California

University of Illinois

Lightyear Ipco B.v.

Hendrik Nicolaas Slingerland

Peter Christiaan Tiemeijer

Pavel Potocek

Cornelis Sander Kooijman

Gerard Nicolaas Anne Van Veen

Uwe Luecken

Raymond Wagner

Pieter Kruit

Frank Jeroen Pieter Schuurmans

Bart Buijsse

Pleun Dona

Faysal Boughorbel

Hendrik Gezinus Tappel

Jan Willem Bruggers

Ali Mohammadi-Gheidari

Mark Meuwese

Alan Frank De Jong

Luigi Mele

William Ralph Knowles

Andreas Karl Schmid

Ivan Petrov

Gerbert Jeroen Van De Water

Guido Martinus Henricus Knippels

Hervé-William Rémigy

Laurens Franz Taemsz Kwakman

Todor I Donchev

Hendrik Jan De Vos

Martin Verheijen

Thomas Duden

Eric Olson

Wouter Lukas Jansen

Fredericus Bernardus Kiewiet

Stephanus Hubertus Leonardus Van Den Boom

Jeroen Van De Water

Johannes Van Den Oetelaar

Adriaan Huibert Dirk Ottevanger

Bernardus Jacobus Marie Bormans

Benjamin John Cook

Jacques Nonhebel

Van Gerard Veen

Frank Schuurmans

Bernardus Bormans

Ralph Knowles

There is provided an electric motor/generator comprising a stator and a rotor. The stator has an outer perimeter. The rotor at least coaxially encloses the outer perimeter of the stator. The rotor is rotatable relative to the stator around a rotation axis. The rotor and the stator are separated by a flux bearing gap over which in working magnetic flux occurs. The rotor and the stator are separated by a protective gap. The protective gap is configured to close, during a deformation of the rotor, before the flux bearing gap closes, thereby avoiding closure of the flux bearing gap. The motor/generator is characterized in that the stator comprises a roller bearing and an axle. The roller bearing is coupled to the axle and rotatable around the axle. The axle is arranged off-center from the rotation axis. A distance between the roller bearing and the rotor defines the protective gap.

Electric motor/generator, vehicle and wind turbine

A method of operating a charged particle microscope comprising the following steps:

Emission noise correction of a charged particle source

The invention relates to a scanning-type charged particle microscope and a method for operation of such a microscope. Disclosed is a novel scanning strategy to the raster scan or serpentine scan. In some embodiment, the beam scanning motion is separated into short-stroke and long-stroke movements, to be assigned to associate short-stroke and long-stroke scanning devices, which may be beam deflectors or stage actuators. The scan strategy which is less susceptible to effects such as overshoot, settling/resynchronization, and 'backlash' effects.

Composite scan path in a charged particle microscope

A method and apparatus for imaging a specimen using a scanning-type microscope, by irradiating a specimen with a beam of radiation using a scanning motion, and detecting a flux of radiation emanating from the specimen in response to the irradiation, in the first sampling session {S} of a set {S}, gathering data from a first collection of sparsely distributed sampling points {P} of set {P}. A mathematical registration correction is made to compensate for drift mismatches between different members of the set {P}, and an image of the specimen is assembled using the set {P} as input to an integrative mathematical reconstruction procedure.

Mathematical image assembly in a scanning-type microscope

The invention relates to a particle-optical apparatus with a predetermined final vacuum pressure. To that end a vacuum chamber of said apparatus is via a first restriction connected to a volume where vapor or gas is present at a known pressure and via a second restriction to a vacuum pump. By making the ratio of the two conductances, associated with said restrictions, a calibrated ratio, the final pressure of the vacuum chamber is a predetermined final pressure. This eliminates the need for e.g. vacuum gauges and control systems, resulting in a more compact design of such apparatus.

Particle optical apparatus with a predetermined final vacuum pressure

A method of determining the temperature of a sample carrier in a charged particle-optical apparatus, characterized in that the method comprises the observation of the sample carrier with a beam of charged particles, the observation giving information about the temperature of the sample carrier. The invention is based on the insight that a charged particle optical apparatus, such as a TEM, STEM, SEM or FIB, can be used to observe temperature related changes of a sample carrier. The changes may be mechanical changes (e.g. of a bimetal), crystallographic changes (e.g. of a perovskite), and luminescent changes (in intensity or decay time). In a preferred embodiment the sample carrier shows two bimetals, showing metals with different thermal expansion coefficients, bending in opposite directions. The distance between the two bimetals is used as a thermometer.

Method of measuring the temperature of a sample carrier in a charged particle-optical apparatus

The invention relates to a method for correcting distortions introduced by the projection system () of a TEM. As known to the person skilled in the art distortions may limit the resolution of a TEM, especially when making a 3D reconstruction of a feature using tomography. Also when using strain analysis in a TEM the distortions may limit the detection of strain. To this end the invention discloses a detector equipped with multipoles (), the multipoles warping the image of the TEM in such a way that distortions introduced by the projection system are counteracted. The detector may further include a CCD or a fluorescent screen () for detecting the electrons.

Method of use for a multipole detector for a transmission electron microscope

The invention relates to an electrostatic beam blanker for a particle-optical apparatus, in which the blanker is used to generate a train of pulses with a fixed repetition rate. Such pulse trains with a sub-picosecond pulse length are for example used in the study of chemistry in the femtosecond scale. The beam blanker according to the invention uses a resonant structure, as a result of which the voltage is amplified by the quality factor Q of the resonant structure. During each zero-crossing of the signal, thus twice per period of the resonant frequency, the beam is transmitted, and the beam is blanked during the rest of the time. In a preferred embodiment the resonant structure comprises a transmission line. Impedance matching of signal source and resonant structure may be performed by tuning stubs.

Beam blanker for interrupting a beam of charged particles

The invention relates to a method in which labels are introduced in a sample, a flat surface is prepared on the sample and a series of images is made of the sample surface with e.g. a scanning electron microscope. The labels may be gold labels or e.g. fluorescent labels. By removing a surface layer between obtaining each image, labels at the surface in one image will be removed and will not be visible in a subsequent image. Thereby a 3D reconstruction of the position of labels in the sample can be made.

Method for localizing labels in a sample

The invention relates to a hybrid phase plate for use in a TEM. The phase plate according to the invention resembles a Boersch phase plate in which a Zernike phase plate is mounted. As a result the phase plate according to the invention resembles a Boersch phase plate for electrons scattered to such an extent that they pass outside the central structure () and resembles a Zernike phase plate for scattered electrons passing through the bore of the central structure. Comparing the phase plate of the invention with a Zernike phase plate is has the advantage that for electrons that are scattered over a large angle, no electrons are absorbed or scattered by a foil, resulting in a better high resolution performance of the TEM. Comparing the phase plate of the invention with a Boersch phase plate the demands for miniaturization of the central structure are less severe.

Hybrid phase plate

A manipulator for use in e.g. a Transmission Electron Microscope (TEM) is described, said manipulator capable of rotating and translating a sample holder (). The manipulator clasps the round sample holder between two members (A,B), said members mounted on actuators (A,B). Moving the actuators in the same direction results in a translation of the sample holder, while moving the actuators in opposite directions results in a rotation of the sample holder.

Manipulator for rotating and translating a sample holder

A cluster tool includes multiple tools for microscopic processing of a sample positioned around a rotatable base. A sample holder on the base rotates the sample between the working areas of the tools. A slidable vacuum seal maintains a vacuum in a sample chamber for tools that require a vacuum.

Cluster tool for microscopic processing of samples

Growing community of inventors

Venlo, Netherlands

Hendrik Nicolaas Slingerland