Kla Tencor Corporation

Hemanta Kumar Roy

Arpit Yati

Arun Lobo

Olivier Moreau

Arpit Jain

A technique to identify non-visual defects, such as SEM non-visual defects (SNVs), includes generating an image of a layer of a wafer, evaluating at least one attribute of the image using a classifier, and identifying the non-visual defects on the layer of the wafer. A controller can be configured to identify the non-visual defects using the classifier. This controller can communicate with a defect review tool, such as a scanning electron microscope (SEM).

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Bardhaman, India

Hemanta Kumar Roy