Siemens Aktiengesellschaft

Helmut Zerbst

Erwin Knapek

Guy LeFranc

Reinhard Weyl

Isolde Dietrich

Fred Fox

Karl Nachtrieb

A magnetic lens system for corpuscular radiation equipment operating in a vacuum, in particular, an objective lens system for electron microscopes, comprising a superconducting shield housing, in which are arranged, at one end, a single hollow cylindrical superconducting shielding device, wound with a lens coil, and at the other end, in front of the free end face of the shielding device, a vacuum chamber for accommodating an object to be examined, permitting the cavity to be relatively large, and detectors for radiation analysis to be arranged therein so that the lens system is therefore suitable for use in scanning electron microscopes.

Magnetic lens system for corpuscular radiation equipment

A magnetic lens arrangement for corpuscular radiation equipment working under a vacuum, in particular an objective lens for high voltage electron microscopes, which permits having objects to be examined disposed in a vacuum chamber at room temperature, is achieved by an arrangement which includes a vacuum chamber having a lens coil winding, a superconductive shielding device which is of cup-shaped design and encloses the winding, two superconductive shielding cylinders disposed one behind the other with mutual spacing enclosed by the winding, with a vacuum chamber for the object to be examined disposed in front of the open side of the shielding device and the first shielding cylinder.

Magnetic lens arrangement for corpuscular radiation equipment working

Growing community of inventors

Munich, Germany

Helmut Zerbst